Summary Table of Surface Analytical Techniques Jump to a graph(58Kb)of Detection Limits vs.Probe Size for analytical techniques. (You will need a browser that supports tables to properly view the following.) Analytical Technique Typical Applications Signal Detected Elements Organic Detection Depth Imaging/ Lateral Resolution Detected Information Limits Resolution Mapping (Probe Size) Auger Surface analysis and high resolution Auger electrons from Li-U 0.1-1a% depth profiling near-surface atoms <2 nm Yes 100 nm FE Auger Surface analysis,microanalysis, Auger electrons from Li-U 0.01-1a% 2-6nm Yes microarea depth profiling near-surface atoms AFM/STM Surface imaging with near atomic Atomic scale roughness 0.01nm Yes resolution Go to top,page down. Analytical Elements Organic Detection Depth Imaging/ Lateral Resolution Typical Applications Signal Detected Technique Detected Information Limits Resolution Mapping (Probe Size) micro-FTIR dentification of polymers,plastics, Infrared organic films,fibers,and liquids absorption H-U Molecular groups 0.1-100ppm No 5 microns 8e9-le12 TXRF Metallic contamination on semiconductor Fluorescent X- S-U 5nm Yes rays at/cm2 10mm wafers XPS/ESCA Surface analysis of organic and inorganic Photoelectrons Li-U Chemical 0.01-1at% 1-10nm Yes molecules bonding 75 microns-2 mm Go to top,page up,page down. Analvtical Elements Organic Detection Lateral Resolution Technique Typical Applications Signal Detected Depth Imaging/ Detected Information Limits Resolution Mapping (Probe Size) HFS Hydrogen in thin films Forward scattered (Quantitative) H,D hydrogen atoms 0.01at% 50nm 2 mm x 10 mm 1-10at% (7220) RBS Quantitative thin film Backscattered He atoms Li-U 0.01-1at% 2-20nm Yes 2 mm composition and thickness 20<Z<701 0.01-0.001at% Z>70) Go to top,page up,page down
Summary Table of Surface Analytical Techniques© Jump to a graph (58Kb) of Detection Limits vs. Probe Size for analytical techniques. (You will need a browser that supports tables to properly view the following.) Analytical Technique Typical Applications Signal Detected Elements Detected Organic Information Detection Limits Depth Resolution Imaging/ Mapping Lateral Resolution (Probe Size) Auger Surface analysis and high resolution depth profiling Auger electrons from near-surface atoms Li - U -- 0.1 - 1 at% <2 nm Yes 100 nm FE Auger Surface analysis, microanalysis, microarea depth profiling Auger electrons from near-surface atoms Li - U -- 0.01 - 1 at% 2 - 6 nm Yes <15 nm AFM/STM Surface imaging with near atomic resolution Atomic scale roughness -- -- -- 0.01 nm Yes 5 nm Go to top, page down. Analytical Technique Typical Applications Signal Detected Elements Detected Organic Information Detection Limits Depth Resolution Imaging/ Mapping Lateral Resolution (Probe Size) micro-FTIR Identification of polymers, plastics, organic films, fibers, and liquids Infrared absorption H - U Molecular groups 0.1 - 100 ppm -- No 5 microns TXRF Metallic contamination on semiconductor wafers Fluorescent Xrays S - U -- 8e9-1e12 at/cm 2 5 nm Yes 10 mm XPS/ESCA Surface analysis of organic and inorganic molecules Photoelectrons Li - U Chemical bonding 0.01 - 1 at% 1 - 10 nm Yes 75 microns - 2 mm Go to top, page up, page down. Analytical Technique Typical Applications Signal Detected Elements Detected Organic Information Detection Limits Depth Resolution Imaging/ Mapping Lateral Resolution (Probe Size) HFS Hydrogen in thin films (Quantitative) Forward scattered hydrogen atoms H, D -- 0.01 at% 50 nm No 2 mm x 10 mm RBS Quantitative thin film composition and thickness Backscattered He atoms Li - U -- 1 - 10 at% (Z<20) 0.01-1 at% (20<Z<70) 0.01-0.001 at% (Z>70) 2 - 20 nm Yes 2 mm Go to top, page up, page down
Analytical Typical Applications Signal Detected Elements Organic Detection Depth Imaging/ Lateral Resolution Technique Detected Information Limits Resolution Mapping (Probe Size) SEM/EDS Imaging and elemental Secondary and backscattered B-U 0.1-1at% 1-5 micron 4.5 nm (SEM) microanalysis electrons and X-rays (EDS) Yes I micron(EDS) FE SEM High resolution imaging of polished Secondary and backscattered precision cross sections Yes electrons 1.5tm FE SEM(in Ultra-high resolution imaging with Secondary and backscattered lens) unique contrast mechanism electrons Yes 0.7m Go to top,page up,page down. Analytical Typical Applications Signal Detected Elements Organic Detection Imaging/ Lateral Resolution Technique Detected Information Limits Depth Resolution Mapping (Probe Size) Dopant and impurity depth 1e12-1e16 SIMS profiling,surface,and Secondary ions H-U at/cm3(ppb 5-30nm Yes micron(Imaging),30 micron(Depth profiling) microanalysis Ppm） Dopant and impurity depth Quad SIMS Secondary ions H-U le14-lel7 profiling.surface.and <5nm Yes <5 micron (Imaging),30 microanalysis,insulators at/cm3 micron(Depth profiling) TOF SIMS Surface microanalysis of polymers Secondary ions, Molecular ions to <I ppma,le9 monolaver.5 nm H-U 0.15 micron (Static SIMS) plastics,and organics atoms,molecules mass10,000 at/cm (Depth profile) Yes MALDI Protein,peptide,and polymer Large molecular Molecular ions to low femtomole molecular weight distribution No ions 1mass500.000 to picomole 50 micron Go to top,page up. Jump to a graph of Detection Limits vs.Probe Size for analytical techniques Jump to a more detailed technique description
Analytical Technique Typical Applications Signal Detected Elements Detected Organic Information Detection Limits Depth Resolution Imaging/ Mapping Lateral Resolution (Probe Size) SEM/EDS Imaging and elemental microanalysis Secondary and backscattered electrons and X-rays B - U -- 0.1 - 1 at% 1 - 5 micron (EDS) Yes 4.5 nm (SEM) 1 micron (EDS) FE SEM High resolution imaging of polished precision cross sections Secondary and backscattered electrons -- -- -- -- Yes 1.5 nm FE SEM (in lens) Ultra-high resolution imaging with unique contrast mechanism Secondary and backscattered electrons -- -- -- -- Yes 0.7 nm Go to top, page up, page down. Analytical Technique Typical Applications Signal Detected Elements Detected Organic Information Detection Limits Depth Resolution Imaging/ Mapping Lateral Resolution (Probe Size) SIMS Dopant and impurity depth profiling, surface, and microanalysis Secondary ions H - U -- 1e12 - 1e16 at/cm3 (ppbppm) 5 - 30 nm Yes 1 micron (Imaging), 30 micron (Depth profiling) Quad SIMS Dopant and impurity depth profiling, surface, and microanalysis, insulators Secondary ions H - U -- 1e14 - 1e17 at/cm3 <5 nm Yes <5 micron (Imaging), 30 micron (Depth profiling) TOF SIMS (Static SIMS) Surface microanalysis of polymers, plastics, and organics Secondary ions, atoms, molecules H - U Molecular ions to mass 10,000 <1 ppma, 1e9 at/cm 2 1 monolayer, 5 nm (Depth profile) Yes 0.15 micron MALDI Protein, peptide, and polymer molecular weight distribution Large molecular ions -- Molecular ions to mass 500,000 low femtomole to picomole -- No 50 micron Go to top, page up. Jump to a graph of Detection Limits vs. Probe Size for analytical techniques. Jump to a more detailed technique description