Release and wrinkling of nanomembranes 3-D diagram of linear network Selective etching Nanomembrane Sacrificial layer Substrate Etching front Starting edge Materials: SiGe, InGaAs Materials growth: MBE,(CVD.; or oxidation for thinning Fabrication Method: Etching Mei et al. Adv. Mater. 19, 2124(2007)
Release and wrinkling of nanomembranes Substrate Nanomembrane Sacrificial layer Selective etching 3-D diagram of linear network Etching front Starting edge Materials: SiGe, InGaAs Materials growth: MBE, (CVD …); or oxidation for thinning Fabrication Method: Etching Mei et al. Adv. Mater. 19, 2124 (2007)
Freestanding or wrinkled Freestanding nanomembrane Wrinkled nanomembrane 体米本 中x重3 计::00m 100um 40um 20um 20um A Malachias, et al. ACS Nano 2, 1715(2008)
Freestanding or wrinkled A. Malachias, et al. ACS Nano 2, 1715 (2008)
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A. Malachias, et al. ACS Nano 2, 1715 (2008)
Optical property of wrinkled nanomembranes in(b) lum in(c) 120 △AFM i Interference-enhancement, F()302 h(nm) 40 (ii Effective excited area due to wrinkled surface, R(SS (iii Power distribution of the AF excitation laser spot. P(x,y Light intensity Distance(um) I(xo, yo)o f(h)R(s/So).P(x-xo, y- yo )dxdy Mei et al. Nano Lett. 7, 1676(2007)
Optical property of wrinkled nanomembranes (i) Interference-enhancement, F(h) (ii) Effective excited area due to wrinkled surface, R(S/S0) (iii) Power distribution of the excitation laser spot. P(x,y) I x y F h R S S P x x y y dxdy 0 0 0 0 0 ( , ) , Light intensity Mei et al. Nano Lett. 7, 1676 (2007)
wrinkle A B
VS A B Roll wrinkle