1.Introduction If the automobile had followed the same development cycle as the computer,a Rolls- Royce would today cost $100,get one million miles to the gallon and explode once a year Digital IC
Digital IC Introduction 1.Introduction If the automobile had followed the same development cycle as the computer, a RollsRoyce would today cost $100, get one million miles to the gallon and explode once a year
outline 。Course Introduction a brief history ·Design Metrics ·DIC characteristics Design partitioning/CMOS logic Semiconductor processing Digital IC 2
Digital IC outline • Course Introduction • a brief history • Design Metrics • DIC characteristics • Design partitioning/CMOS logic • Semiconductor processing 2
Semiconductor processing Semiconductor fabrication 。Layout fundamental o Semiconductor testing Semiconductor assembling Digital IC 3
Digital IC Semiconductor processing • Semiconductor fabrication • Layout fundamental • Semiconductor testing • Semiconductor assembling 3
CMOS Fabrication CMOS transistors are fabricated on silicon wafer photolithography process similar to printing press On each step,different materials are deposited or etched Easiest to understand by viewing both top and cross-section of wafer in a simplified process Note:photolithography from Greek photo(light),lithos(stone),and graphe(picture) means "carving pictures in stone using light Digital IC 4
Digital IC CMOS Fabrication • CMOS transistors are fabricated on silicon wafer • photolithography process similar to printing press • On each step, different materials are deposited or etched • Easiest to understand by viewing both top and cross-section of wafer in a simplified process • Note:photolithography from Greek photo(light),lithos(stone),and graphe(picture) means “carving pictures in stone using light” 4
Inverter Cross-section Typically use p-type substrate for nMOS transistors Requires n-well for body of pMOS transistors GND N SiO2 n+diffusion p+diffusion n+ n+ p+ p+ n well polysilicon p substrate metal1 nMOS transistor pMOS transistor Digital IC 5
Digital IC Inverter Cross-section • Typically use p-type substrate for nMOS transistors • Requires n-well for body of pMOS transistors n+ p substrate p+ n well A Y GND VDD n+ p+ SiO2 n+ diffusion p+ diffusion polysilicon metal1 nMOS transistor pMOS transistor 5