Transmission Electron Microscopy B 电子光学基础 1
Transmission Electron Microscopy 1 电子光学基础
电子光学基础 。电子波与电磁透镜 。电磁透镜的像差与分辨率 电磁透镜的景深和焦长 Water-cooled surface Electron ray paths Water SPower Soft Fe pole pieces C coils 2
电子波与电磁透镜 电磁透镜的像差与分辨率 电磁透镜的景深和焦长 电子光学基础 2
Frequency in Wavelength cycles per second in nm 106- m 400- 1020- Gamma rays Violet One angstrom 10 450 Indigo One nanometer X-rays 500- Blue Ultravioler Green 105 One micrometer Visible Light Yellow 10 Infrared 600 Orange s子 One centimeter 00 Red 1010- Short radio waves One meter Short radio waves 109 750 Broadcast band One kilometer 105 Visible Light:~6000 A 10 Long radio waves X-rays: λ0.5-2.5A Electrons: 10.05A 3
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电子束与固态样品相互作用 SEM Incident high-kV beam Secondary electrons (SE) Backscattered electrons (BSE) Characteristic X-rays EDS/WDS Auger Visible electrons Light Absorbed' Electron-hole electrons pairs Bremsstrahlung Specimen X-rays Elastically Inelastically scattered Direct scattered electrons Beam electrons 4 TEM
4 EDS/WDS SEM 电子束与固态样品相互作用 TEM
透射电子显微镜 ..3/ m 品lte iayMarch 9,1931 1938 Sketch of 1st TEM 1st commercial TEM by Siemens 5 第一台电子显微镜by Ruska in1930s
透射电子显微镜 第一台电子显微镜by Ruska in 1930s March 9, 1931 1938 5 Sketch of 1st TEM 1 st commercial TEM by Siemens