⑧ Part 1 INTRODUCTION TO ANALYTICAL ELECTRON MICROSCOPY 材料科学与工程学院 School of Materials Science and Engineering
材料科学与工程学院 School of Materials Science and Engineering INTRODUCTION TO ANALYTICAL ELECTRON MICROSCOPY Part 1
Jeol2010F Robert Hooke(1635-1703) 于17世纪晚期设计的显微 镜 g A 1938 0.138nm Vaccinia virus
8 Jeol2010F Vaccinia virus
Materials Characterization ATETRAHEDRONOF MATERIALS ENGINEERING Properties=Products &Applications Microstructure -Characterization Composition Preparation Processing Thermal,mechanical,... R D-Quality Control -Failure Analysis
Materials Characterization A “TETRAHEDRON” OF MATERIALS ENGINEERING Properties Products &Applications Microstructure – Characterization Composition - Preparation Processing – Thermal, mechanical, … ------------------------------------ R & D – Quality Control – Failure Analysis
Theoret Limit of Resolution for a Microscope Resolution or Resolving Power Rayleigh Criterion d=0.61元/n sin a .Optica/Microscope-micron or submicron Amin =400 nm (purple),nmax1.5 (oil), amax≈75°，d≈0.2um .M do Effective Magnification of OM Naked eye:D 0.2 mm Mer=D/d=0.2mm/0.2μm=1,000X
Theoret. Limit of Resolution for a Microscope • Resolution or Resolving Power Rayleigh Criterion d0 = 0.61 / n sin • Optical Microscope – micron or submicron min = 400 nm (purple), nmax 1.5 (oil), max 75º, d0 0.2 m • Effective Magnification of OM Naked eye: D = 0.2 mm Meff = D / d0 = 0.2 mm / 0.2 m = 1,000 X d0 M d0
Metallography in a Broadened Sense -Materialography- .Conventional Materials Microcharacterization Morphology+Composition+Structure+(Property) By OM /Chemical analysis XRD /(e.g.Microhardness) Aiming to:High spatial resolution In-situ characterization Only being met by Electron Microscopy 1932 E.Ruska M.Knoll -TEM Transmission EM) 1938 M.von Ardenne-SEM /Scanning EM 1951 R.Castaing EPMA (Electron Probe X-ray Microanalyzer 1986 E.Ruska-Nobel (Physics)Prize
Metallography in a Broadened Sense - Materialography - • Conventional Materials Microcharacterization - Morphology+Composition+Structure+(Property) By OM / Chemical analysis / XRD / (e.g. Microhardness) - Aiming to: High spatial resolution + In-situ characterization • Only being met by Electron Microscopy - 1932 E. Ruska & M. Knoll – TEM (Transmission EM) - 1938 M. von Ardenne – SEM (Scanning EM) - 1951 R. Castaing – EPMA (Electron Probe X-ray Microanalyzer) - 1986 E. Ruska - Nobel (Physics) Prize