● The mu| tiMode microscope includes an optical detection head scanner, and microscope base. The com pact, rigid construction of the microscope gives it the mechanical stability and low noise needed for high resolution The microscope performs the full range of SPM techniques to measure surface characteristics including topography, elasticity, friction adhesion magnetic fields, and electrical fields
⚫The MultiMode microscope includes an optical detection head, scanner, and microscope base. The compact, rigid construction of the microscope gives it the mechanical stability and low noise needed for high resolution. ⚫The microscope performs the full range of SPM techniques to measure surface characteristics including topography, elasticity, friction, adhesion, magnetic fields, and electrical fields
.Atomic Force Microscopy Instrumentation Principle of Atomic Force Microscopy oModes of operation In Atom ic Force Microscopy .Applications of Atomic Force Microscopy
⚫Atomic Force Microscopy Instrumentation ⚫Principle of Atomic Force Microscopy ⚫Modes of Operation In Atomic Force Microscopy ⚫Applications of Atomic Force Microscopy
AFM原理 检测系统 ● The cantilever 扫描系统 ● The piezoscanner 反馈系统 ● The force sensor ● The feedback system laser diode mirron sensor output, 8c, F A⊥B cantilever position sensitive pong which deflects a probe tp photodetector scans sample surtace mearures deflect on af cantilever dc p robe ti urface 10-15 properties and causes ERROR unilever to deflect nen feedback loop controls t-ganpl paten computer controls sytem zoelectric performs data acquint on, alais scanner poritions sampl
AFM原理 检测系统 扫描系统 反馈系统 ⚫The cantilever. ⚫The piezoscanner. ⚫The force sensor. ⚫The feedback system
the main elements of the aFm ● Cantilever(+ Probe) ● Piezoscanner ● Laser beam source ● Photodiode detector ● Feedback systen photodiode (deflection detector) Mirror Laser beam Si gnal a Probe Path of tip Piez Feedback signal probe monitored 3-Dim ensional IMAGE
⚫Cantilever (+Probe) ⚫Piezoscanner ⚫Laser beam source ⚫Photodiode detector ⚫Feedback system the main elements of the AFM
检测系统 检测:悬臂的偏转或振幅的改变 检测方法:光反射法,光干涉法,隧道电 流法,电容检测法 激光光反射检测系统:探针,激光发生器 检测器
检测系统 检测：悬臂的偏转或振幅的改变 检测方法：光反射法， 光干涉法，隧道电 流法， 电容检测法 激光光反射检测系统：探针，激光发生器 检测器