Round-robin comparison There is no standard of nanopore size calibration for sub-micron thin films. Recently,a systematic round-robin of identical porous low-k thin films from different manufacturers was performed to compare the results of beam-PALS. specular X-ray reflectivity (SXR)/small angle neutron scattering (SANS),and traditional N2 porosimetry (BET) PDF文件使用"pdfFactory”试用版本创建www.fineprint.cn
There is no standard of nanopore size calibration for sub-micron thin films. Recently, a systematic round-robin of identical porous low-k thin films from different manufacturers was performed to compare the results of beam-PALS, specular X-ray reflectivity (SXR)/ small angle neutron scattering (SANS), and traditional N2 porosimetry (BET). Round-robin comparison PDF 文件使用 "pdfFactory" 试用版本创建 www.fineprint.cn
16 PALS SANS EP 12 BET 8 4 Tem_sllA Tem_sll XLK2.0 ELK Porous low-k films Comparison on pore sizes in open-pored low-k films (In the pore diameter range from 2 to 15nm) PDF文件使用"pdfFactory”试用版本创建w,fineprint..cn
• Comparison on pore sizes in open-pored low-k films (In the pore diameter range from 2 to 15nm) PDF 文件使用 "pdfFactory" 试用版本创建 Ìwww.fineprint.cn Ì
Pore diameter(nm) 1614 12 Perfect Agreemert 10 86 4 SANS 2 EP BET 68 10121416 Other Methods Comparison on PALS technique with other methods PDF文件使用"pdfFactory”试用版本创建l.fineprint.cn
Comparison on PALS technique with other methods PDF 文件使用 "pdfFactory" 试用版本创建 Ìwww.fineprint.cn ÿÌ
5.T卫模型的改进 Rectangular Tao-Eldrup model (RTE) PDF文件使用"pdfFactory”试用版本创建ww.fineprint.cn
5. TE 模型的改进 ------ Rectangular Tao-Eldrup model (RTE) PDF 文件使用 "pdfFactory" 试用版本创建 ÿwww.fineprint.cn
·Tao-Eldrup在低温和基态(1S),适用孔径<1~2nm; ETLT(Elastic Thermalization Lifetime analysis) Bubble Model (in liquid) ·对大的介孔，必须修正：考虑激发态贡献，或采用 不同的势阱. Rectangular Tao-Eldrup model 激发态近似 PDF文件使用"pdfFactory”试用版本创建www.fineprint.cn
l Tao-Eldrup 在低温和基态(1S), 适用孔径<1~2nm; lETLT(Elastic Thermalization Lifetime analysis) lBubble Model (in liquid) l 对大的介孔,必须修正: 考虑激发态贡献,或采用 不同的势阱. lRectangular Tao-Eldrup model l激发态近似 PDF 文件使用 "pdfFactory" 试用版本创建 www.fineprint.cn