Alternative Fabrication methods Soft lithography Micro molding in capillaries Micro contact printing (MIMC Long chain thiol PDMS Auar Ag PDMS 20-200m SAMs 23n Replica molding Y Xia and g m Whitesides( harvard U) PU MIT BioMEMS. Fall 2003
Alternative Fabrication Methods • Soft lithography Micro molding in capillaries Replica Molding Micro contact printing (MIMC) Y. Xia and G.M. Whitesides (Harvard U.) MIT BioMEMS, Fall 2003
Other Polymer Methods Hot embossing Injection molding Stamp(master) Heat and pressure Thermoplastic Substrate MIT BioMEMS. Fall 2003
Other Polymer Methods • Hot embossing Hot embossing • Injection molding Stamp (master) Heat and pressure Thermoplastic Substrate MIT BioMEMS, Fall 2003
Examples of bioMEMs Systems Detection and diagnosis Synthesis and analysis Interaction and interrogation · Treatment MIT BioMEMs. Fall 2003
Lab-on-a-chip (Caliper) Examples of bioMEMS Systems • Detection and diagnosis • Synthesis and analysis • Interaction and interrogation • Treatment MIT BioMEMS, Fall 2003
DNA electrophoresis丨 A95c· me te B 7/C extension C 60C. amano CR chip (A Manz, Imperial College) Etched glass Continuous Three t zones Thermal insulation MIT BioMEMs. Fall 2003
DNA electrophoresis I PCR chip (A. Manz, Imperial College) • Etched glass • Continuous • Three T zones • Thermal insulation MIT BioMEMS, Fall 2003
DNA electrophoresis lI Electrode insertion scheme matching hig throughput need ◎ ◎ Pt Electrode TTTTTTTT 中 二二3 Elastomer Reservoir Array CAE micro-plate 2222 Mathies( Berkeley) High throughput Etched glass MIT BioMEMs. Fall 2003
DNA electrophoresis II • Electrode insertion scheme matching high throughput need Mathies (Berkeley) • High throughput • Etched glass MIT BioMEMS, Fall 2003