特征X射线测定方式 Wavelength Dispersive Spectrometry (WDS)uses the wavelength of x-rays. o Energy Dispersive Spectrometry (EDS) uses the energy of the x-rays. hc 1.2396 E 01 λ E(keV 0= 入(nm) 检测X射线波长的谱仪称波谱仪(WDS) 检测X射线能量的谱仪称能谱仪(EDS)
特征X射线测定方式 检测X射线波长的谱仪称波谱仪(WDS) 检测X射线能量的谱仪称能谱仪(EDS)
X射线微区成分分析发展历史 In 1948 a prototype wavelength dispersive spectrometer was developed. In 1949 the first microprobe was built by Raymond Castaing,the father of X-ray microanalysis. 1956 first commercial Electron Probe Microanalyzer(EPMA)was developed in France- static electron probe. 1956-scanning EPMA developed in England. Late 1960s development of solid (Si(Li))state EDS detectors. Late 1960s EDS detector attached to an SEM
X射线微区成分分析发展历史
特征射线测定方式 WDS EDS Specimen Specimen O Detector ☑ Multichannel Analyzer Source Source Crysta (a) Si(Li)Detector (b) 20 E Figure 6.6 Main components and dispersive spectra of:(a)WDS;and(b)EDS. (Figures reproduced from Leng) WDS uses single crystal diffraction to EDS uses photon detector to detect characteristic wavelengths separate characteristic x-ray photons emitted by specimen according to energy
特征X射线测定方式
特征射线测定方式 Schematic of an Electron Microprobe with a Wavelength Dispersive Spectrometer Electron gun Wehnelt cap Energy Resolution of EDS vs WDS Au Pt Nb EDS Condenser lenses Optical microscope B CCD camera Objective lens aperture Probe current detector cmm Scan coils OM objective lens Crystal 1.8 ---2.0 2.2 -2.4 Objective lens Secondary Au Ma electron WDS detector 怡velength Pt Ma dispersive Pt MB spectrometer 关y Stage Au MB Electron Beam Window:Be or UTW Cold Finger Objective lens Nb Lo Nb LB Si (L1)Detector 2.002.05 2.10 2.152.20 2.25 2.30 X-rays Collimator X-ray Energy(keV) Schemotic of an Energy Dispersive Spectrometer
特征X射线测定方式
特征射线测定方式 WDS EDS ·△)λ/八：0.0020.02 ·150200eV ·△E:10~100eV 。λ= 2dsin0 EDS spectrum n 日max ~73° Xmax=1.9d WDS spectrum ·d is determined by the analyzing crystal 2270 2375 2460 eV WDS spectrum from Mo,S,and Pb.25kV,10nA,0.5 mm slit. Corresponding energy dispersive (EDS)spectrum
特征X射线测定方式