北京大学：《集成电路原理与设计 Principle of Integrated Circuits》课程电子教案（数字集成电路原理与设计）chap1 绪论及工艺原理 第一章 绪论 第二章 集成电路制作工艺 2.1.1 集成电路加工的基本操作

Generated by Foxit PDF Creator Foxit Software ttp//www.foxitsoftware.comForevaluationonly 晶体管发展 Transistor-Bardeen et al ( Bell Labs)in 1947 Bipolar transistor- Schockley in 1948 First monolithic IC- Jack Kilby in 1958 First commercial IC logic gates- Fairchild 1960 ttL-1962 into the 1990's ECL 1974 into the 1980's

11 晶体管发展  Transistor –Bardeen et.al. (Bell Labs) in 1947  Bipolar transistor – Schockley in 1948  First monolithic IC – Jack Kilby in 1958  First commercial IC logic gates – Fairchild 1960  TTL – 1962 into the 1990’s  ECL – 1974 into the 1980’s Generated by Foxit PDF Creator © Foxit Software http://www.foxitsoftware.com For evaluation only

Generated by Foxit PDF Creator Foxit Soft ttp//www.foxitsoftware.comForevaluation MOSFET工艺 MOSFET transistor-Lilienfeld( canada in 1925 and Heil (england) in 1935 CMOS-1960s,但是有很多工艺加工问题 PMOS in 1960s(calculators) NMOS in 1970's(4004, 8080)-for speed CMOS in1980’s-功耗优势 BicMoS, Gallium-Arsenide silicon-Germanium SOI, Copper-Low K, strained silicon, High-k gate oxide

12 MOSFET 工艺  MOSFET transistor - Lilienfeld (Canada) in 1925 and Heil (England) in 1935  CMOS – 1960’s, 但是有很多工艺加工问题  PMOS in 1960’s (calculators)  NMOS in 1970’s (4004, 8080) – for speed  CMOS in 1980’s – 功耗优势  BiCMOS, Gallium-Arsenide, Silicon-Germanium  SOI, Copper-Low K, strained silicon, High-k gate oxide... Generated by Foxit PDF Creator © Foxit Software http://www.foxitsoftware.com For evaluation only

nerated by Foxit PDF Creator@ Foxit Software I//www.foxitsoftware.comForevaluationonly The First Integrated circuits Bipolar lo glc 1960 ECL 3-input Gate Motorola 1966

13 The First Integrated Circuits Bipolar logic 1960’s ECL 3-input Gate Motorola 1966 Generated by Foxit PDF Creator © Foxit Software http://www.foxitsoftware.com For evaluation only

Generated by Foxit PDF Creator Foxit Soft ttp//www.foxitsoftware.comForevaluation Intel 4004 Micro-Processor 1971 2 1000 transistors 1 MHz operation NMOS工艺

14 Intel 4004 Micro-Processor 1971 1000 transistors 1 MHz operation： NMOS 工艺 Generated by Foxit PDF Creator © Foxit Software http://www.foxitsoftware.com For evaluation only

Generated by Foxit PDF Creator Foxit Software Intel Pentium(Iv microprocessor ■ 15

15 Intel Pentium (IV) microprocessor Generated by Foxit PDF Creator © Foxit Software http://www.foxitsoftware.com For evaluation only