ANALOG Precision Triaxial Inclinometer and DEVICES Accelerometer with SPl AD1S16210 FEATURES GENERAL DESCRIPTION Triaxial,digital inclinometer system The ADIS16210 iSensor"is a digital inclinometer system that ±18o°measurement range,,roll and pitch axes provides precise measurements for both pitch and roll angles ±90°gravity axis over a full orientation range of +180.It combines a MEMS tri- ±o.1°relative accuracy axial acceleration sensor with signal processing,addressable user Triaxial,digital accelerometer,high accuracy registers for data collection/programming,and a SPI-compatible t1.7 g measurement range serial interface.In addition,the production process includes unit ±0.05°axis-to-axis alignment specific calibration for optimal accuracy performance.It also Digital internal temperature measurements offers digital temperature sensor and power supply measurements Digital internal power supply measurements together with configuration controls for in-system calibration, Programmable user calibration options sample rate,filtering,alarms,I/O configuration,and power Single command,frame alignment management. Manual accelerometer bias correction The MEMS sensor elements are bound to an aluminum core for Programmable operation and control tight platform coupling and excellent mechanical stability.An Sample rate/filtering Alarm conditions and indicator output internal clock drives the data sampling system,which eliminates the need for an external clock source.The SPI and data buffer Input/output:data ready,alarm,general-purpose structure provide convenient access to accurate sensor data and Power management functions configuration controls. SPl-compatible serial interface Serial number and device ID The ADIS16210 is available in a 15 mm x 24 mm x 15 mm module Single-supply operation:3.0V to 3.6 V that provides mounting tabs with M2-sized mounting holes and a Calibrated temperature range:-40C to +85C flexible,edge terminated connector interface.It has an extended 15 mm x 24 mm x 15 mm package with flexible connector operating temperature range of-40C to +125C. APPLICATIONS Platform control,stabilization,and alignment Tilt sensing,inclinometers,and leveling Motion/position measurement Monitor/alarm devices(security,medical,safety) Navigation FUNCTIONAL BLOCK DIAGRAM DIO1 DIO2 RST Q ADIS16210 SELF TEST o ALARMS POWER MANAGEMENT DGND TRIAXIAL SENSOR ONTROLLER CONTROL cs REGISTERS TEMPERATURE SPI SCLK PORT SENSOR DIGITAL CORRECTION DIN AND INCLINE FILTER CALIBRATION REGISTERS SUPPLY ALIGNMENT Figure 1. Rev.A Inform fumished by Analog Devices is believed to be accurate and reliable.However,no responsibility is assumed by Analog Devices for its use,nor for any infringements of patents or other rights of third parties that may result fromits use.Specifications subject to change without notice.No One Technology Way,P.O.Box 9106,Norwood,MA 02062-9106,U.S.A. nse is granted by implication or otherwise under any patent or patent rights of Analog Devices Tel:781.329.4700 www.analog.com marks are the property oftheir respective owners. FaX:781.4613113 2011 Analog Devices,Inc.All rights reserved
Precision Triaxial Inclinometer and Accelerometer with SPI ADIS16210 Rev. A Information furnished by Analog Devices is believed to be accurate and reliable. However, no responsibility is assumed by Analog Devices for its use, nor for any infringements of patents or other rights of third parties that may result from its use. Specifications subject to change without notice. No license is granted by implication or otherwise under any patent or patent rights of Analog Devices. Trademarks and registered trademarks are the property of their respective owners. One Technology Way, P.O. Box 9106, Norwood, MA 02062-9106, U.S.A. Tel: 781.329.4700 www.analog.com Fax: 781.461.3113 ©2011 Analog Devices, Inc. All rights reserved. FEATURES Triaxial, digital inclinometer system ±180° measurement range, roll and pitch axes ±90° gravity axis ±0.1° relative accuracy Triaxial, digital accelerometer, high accuracy ±1.7 g measurement range ±0.05° axis-to-axis alignment Digital internal temperature measurements Digital internal power supply measurements Programmable user calibration options Single command, frame alignment Manual accelerometer bias correction Programmable operation and control Sample rate/filtering Alarm conditions and indicator output Input/output: data ready, alarm, general-purpose Power management functions SPI-compatible serial interface Serial number and device ID Single-supply operation: 3.0 V to 3.6 V Calibrated temperature range: −40°C to +85°C 15 mm × 24 mm × 15 mm package with flexible connector APPLICATIONS Platform control, stabilization, and alignment Tilt sensing, inclinometers, and leveling Motion/position measurement Monitor/alarm devices (security, medical, safety) Navigation GENERAL DESCRIPTION The ADIS16210 iSensor® is a digital inclinometer system that provides precise measurements for both pitch and roll angles over a full orientation range of ±180°. It combines a MEMS triaxial acceleration sensor with signal processing, addressable user registers for data collection/programming, and a SPI-compatible serial interface. In addition, the production process includes unit specific calibration for optimal accuracy performance. It also offers digital temperature sensor and power supply measurements together with configuration controls for in-system calibration, sample rate, filtering, alarms, I/O configuration, and power management. The MEMS sensor elements are bound to an aluminum core for tight platform coupling and excellent mechanical stability. An internal clock drives the data sampling system, which eliminates the need for an external clock source. The SPI and data buffer structure provide convenient access to accurate sensor data and configuration controls. The ADIS16210 is available in a 15 mm × 24 mm × 15 mm module that provides mounting tabs with M2-sized mounting holes and a flexible, edge terminated connector interface. It has an extended operating temperature range of −40°C to +125°C. FUNCTIONAL BLOCK DIAGRAM ADIS16210 INCLINE CALIBRATION SELF TEST I/O ALARMS CONTROL REGISTERS SPI PORT OUTPUT REGISTERS CORRECTION AND ALIGNMENT DIGITAL FILTER TRIAXIAL MEMS SENSOR TEMPERATURE SENSOR SUPPLY POWER MANAGEMENT CS SCLK DIN DOUT GND DIO1 DIO2 RST VDD CONTROLLER 09593-001 Figure 1
ADIS16210 TABLE OF CONTENTS Features........ System Tools. …14 Applications.… Global Commands....... 14 General Description..... 1 Input/Output Functions.... .14 Functional Block Diagram. Device Identification15 Revision History2 Status/Error Flags15 SpecificationS3 Flash Memory Management15 Timing Specifications .4 Alr..8 Absolute Maximum Ratings....... …5 System Alarm.... .16 ESD Caution.… 5 Static Alarms..... .16 Pin Configuration and Function Descriptions... 46 Dynamic Alarms.... .16 Basic peration. Alarm Reporting.... 16 Reading Sensor Data Applications Information. .17 Device Configuration. Interface Board.7 User Register Map.8 Mating Outline Output Data Registers.9 Ordering Signal Processing,Bias Correction,and Alignment........12 REVISION HISTORY 6/11-Rev.0to Rev.A Changes to Table 13 Changes to Table 23.12 Changes to Figure 24 and Figure 25.... .17 4/11-Revision 0:Initial Version Rev.A [Page 2 of 20
ADIS16210 Rev. A | Page 2 of 20 TABLE OF CONTENTS Features .............................................................................................. 1 Applications....................................................................................... 1 General Description ......................................................................... 1 Functional Block Diagram .............................................................. 1 Revision History ............................................................................... 2 Specifications..................................................................................... 3 Timing Specifications .................................................................. 4 Absolute Maximum Ratings............................................................ 5 ESD Caution.................................................................................. 5 Pin Configuration and Function Descriptions............................. 6 Basic Operation................................................................................. 7 Reading Sensor Data.................................................................... 7 Device Configuration .................................................................. 7 User Register Map ............................................................................ 8 Sensor Data........................................................................................ 9 Output Data Registers.................................................................. 9 Signal Processing, Bias Correction, and Alignment .................. 12 System Tools.................................................................................... 14 Global Commands ..................................................................... 14 Input/Output Functions ............................................................ 14 Device Identification.................................................................. 15 Status/Error Flags ....................................................................... 15 Flash Memory Management..................................................... 15 Alarms.............................................................................................. 16 System Alarm.............................................................................. 16 Static Alarms............................................................................... 16 Dynamic Alarms ........................................................................ 16 Alarm Reporting ........................................................................ 16 Applications Information .............................................................. 17 Interface Board ........................................................................... 17 Mating Connector...................................................................... 17 Outline Dimensions ....................................................................... 18 Ordering Guide .......................................................................... 18 REVISION HISTORY 6/11—Rev. 0 to Rev. A Changes to Table 1............................................................................ 3 Changes to Table 23........................................................................ 12 Changes to Figure 24 and Figure 25............................................. 17 4/11—Revision 0: Initial Version
ADIS16210 SPECIFICATIONS Ta=-40C to +85C,VDD =3.0 V to 3.6 V,unless otherwise noted. Table 1. Parameter Test Conditions/Comments Min Typ Max Unit INCLINOMETERS Measurement Range -180 +180 Degrees Relative Accuracy ±30°，AVG_CNT≥0x0009,μ±3o ±0.1 Degrees ±60°，AVG_CNT20x0009,μ±1o ±0.1 Degrees ±60°，AVG_CNT≥0x0009,μ±3o ±0.15 Degrees ±180°，AVG CNT≥0x0009,μ±1o ±0.14 Degrees ±180°，AVG_CNT≥0x0009,μ±3o ±0.21 Degrees Noise Density TA=25℃，AVG CNT=0x0000 ±0.011 /Hz ACCELEROMETERS Measurement Range ±1.7 P Offset Error μ±1g ±1 mg Sensitivity Error μ±1o ±0.0244 9% Nonlinearity ±1g,μ±10 ±1 ±2 mg Misalignment Axis to axis,deviation from90°，μ±1g ±0.05 Degrees Noise Density TA=25℃，AVG CNT=0x0000 190 μg/WHz Bandwidth -3 dB decrease in dc sensitivity,TA=25C 50 Hz Sensor Resonant Frequency TA=25C 5.5 kHz LOGIC INPUTS Input High Voltage,VINH 2.0 Input Low Voltage,VINL 0.8 Logic 1 Input Current,liNH ViH=3.3V ±0.2 ±1 A Logic 0 Input Current,liNL VL=0V All Except RST -40 -60 A RST -1 mA Input Capacitance,CIN 10 pF DIGITAL OUTPUTS' Output High Voltage,VoH IsouRCE=1.6 mA 2.4 V Output Low Voltage,Vou IsINK=1.6 mA 0.4 V FLASH MEMORY Endurance2 10,000 Cycles Data Retention3 T=85℃ 20 Years START-UP TIME4 Initial Startup 156 ms Reset Recoverys RST pulse low or Register GLOB_CMD[7]=1 33.8 ms Sleep Mode Recovery After CS assertion from high to low 22.3 ms CONVERSION RATE Register AVG_CNT=0x0000 512 SPS Clock Accuracy 3 % POWER SUPPLY Operating voltage range,VDD 3.0 3.3 3.6 V Power Supply Current Normal mode,Ta=25℃ 18 mA Sleep mode,TA=25C 230 uA The digital V/O signals are 5 V tolerant. 2 Endurance is qualified as per JEDEC Standard 22,Method A117,and measured at-40C,+25C,+85C,and +125C. Retention lifetime equivalent at junction temperature(T)=85"C as per JEDEC Standard 22,Method A117.Retention lifetime decreases with junction temperature.See Figure 22. +The start-up times presented do not include the data capture time,which is dependent on the AVG_CNT register settings. s The RST pin must be held low for at least 15 ns. Rev.A|Page3 of 20
ADIS16210 Rev. A | Page 3 of 20 SPECIFICATIONS TA = −40°C to +85°C, VDD = 3.0 V to 3.6 V, unless otherwise noted. Table 1. Parameter Test Conditions/Comments Min Typ Max Unit INCLINOMETERS Measurement Range −180 +180 Degrees Relative Accuracy ±30°, AVG_CNT ≥ 0x0009, μ ± 3 σ ±0.1 Degrees ±60°, AVG_CNT ≥ 0x0009, μ ± 1 σ ±0.1 Degrees ±60°, AVG_CNT ≥ 0x0009, μ ± 3 σ ±0.15 Degrees ±180°, AVG_CNT ≥ 0x0009, μ ± 1 σ ±0.14 Degrees ±180°, AVG_CNT ≥ 0x0009, μ ± 3 σ ±0.21 Degrees Noise Density TA = 25°C, AVG_CNT = 0x0000 ±0.011 °/√Hz ACCELEROMETERS Measurement Range ±1.7 g Offset Error μ ± 1 σ ±1 mg Sensitivity Error μ ± 1 σ ±0.0244 % Nonlinearity ±1 g, μ ± 1 σ ±1 ±2 mg Misalignment Axis to axis, deviation from 90°, μ ± 1 σ ±0.05 Degrees Noise Density TA = 25°C, AVG_CNT = 0x0000 190 μg/√Hz Bandwidth −3 dB decrease in dc sensitivity, TA = 25°C 50 Hz Sensor Resonant Frequency TA = 25°C 5.5 kHz LOGIC INPUTS1 Input High Voltage, VINH 2.0 V Input Low Voltage, VINL 0.8 V Logic 1 Input Current, IINH VIH = 3.3 V ±0.2 ±1 μA Logic 0 Input Current, IINL VIL = 0 V All Except RST −40 −60 μA RST −1 mA Input Capacitance, CIN 10 pF DIGITAL OUTPUTS1 Output High Voltage, VOH ISOURCE = 1.6 mA 2.4 V Output Low Voltage, VOL ISINK = 1.6 mA 0.4 V FLASH MEMORY Endurance2 10,000 Cycles Data Retention3 TJ = 85°C 20 Years START-UP TIME4 Initial Startup 156 ms Reset Recovery5 RST pulse low or Register GLOB_CMD[7] = 1 33.8 ms Sleep Mode Recovery After CS assertion from high to low 22.3 ms CONVERSION RATE Register AVG_CNT = 0x0000 512 SPS Clock Accuracy 3 % POWER SUPPLY Operating voltage range, VDD 3.0 3.3 3.6 V Power Supply Current Normal mode, TA = 25°C 18 mA Sleep mode, TA = 25°C 230 μA 1 The digital I/O signals are 5 V tolerant. 2 Endurance is qualified as per JEDEC Standard 22, Method A117, and measured at −40°C, +25°C, +85°C, and +125°C. 3 Retention lifetime equivalent at junction temperature (TJ) = 85°C as per JEDEC Standard 22, Method A117. Retention lifetime decreases with junction temperature. See Figure 22. 4 The start-up times presented do not include the data capture time, which is dependent on the AVG_CNT register settings. 5 The RST pin must be held low for at least 15 ns
ADIS16210 TIMING SPECIFICATIONS TA=25C,VDD=3.3 V,unless otherwise noted. Table 2. Parameter Description Min' Typ Max Unit fscLK SCLK frequency 10 830 kHz tSTALL Stall period between data,between 16th and 17th SCLK 40 5 tcs Chip select to SCLK edge 48.8 ns tDAV DOUT valid after SCLK edge 100 ns tosu DIN setup time before SCLK rising edge 24.4 ns tDHD DIN hold time after SCLK rising edge 48.8 tsR SCLK rise time 12.5 tsr SCLK fall time 12.5 ns tor,toR DOUT rise/fall times,not shown in Timing Diagrams section. 12.5 tsFs CS high after SCLK edge 5 ns Guaranteed by design,not tested. Timing Diagrams cs tsR tcs 4-tsrs SCLK DOUT MSB DB14 DB13 DB12 DB11 DB10 DB2 DB1 DIN w A6 A4 A3 A2 D2 D1 Figure 2.SPI Timing and Sequence tSTALL SCLK Figure 3.DIN Bit Sequence Rev.A|Page4of 20
ADIS16210 Rev. A | Page 4 of 20 TIMING SPECIFICATIONS TA = 25°C, VDD = 3.3 V, unless otherwise noted. Table 2. Parameter Description Min1 Typ Max Unit fSCLK SCLK frequency 10 830 kHz tSTALL Stall period between data, between 16th and 17th SCLK 40 μs tCS Chip select to SCLK edge 48.8 ns tDAV DOUT valid after SCLK edge 100 ns tDSU DIN setup time before SCLK rising edge 24.4 ns tDHD DIN hold time after SCLK rising edge 48.8 ns tSR SCLK rise time 12.5 ns tSF SCLK fall time 12.5 ns tDF, tDR DOUT rise/fall times, not shown in Timing Diagrams section. 5 12.5 ns tSFS CS high after SCLK edge 5 ns 1 Guaranteed by design, not tested. Timing Diagrams CS SCLK DOUT DIN 1 23 4 56 15 16 R/W A6 A5 A4 A3 A2 D2 MSB DB14 D1 LSB DB13 DB12 DB11 DB10 DB2 DB1 LSB tCS tSFS tDAV tSR tSF tDSU tDHD 09593-002 Figure 2. SPI Timing and Sequence CS SCLK tSTALL 09593-003 Figure 3. DIN Bit Sequence
ADIS16210 ABSOLUTE MAXIMUM RATINGS Table 3. Table 4.Package Characteristics Parameter Rating Package Type 日A θc Device Weight Acceleration 15-Lead Module 31C/W 11CMW 7.2 grams Any Axis,Unpowered 3500g Any Axis,Powered 35009 VDD to GND -0.3Vto+6.0V ESD CAUTION Digital Input Voltage to GND -0.3Vto+5.3V ESD (electrostatic discharge)sensitive device. Digital Output Voltage to GND -0.3Vto VDD+0.3V Charged devices and circuit boards can discharge without detection.Although this product features Analog Inputs to GND -0.3Vto+3.6V patented or proprietary protection circuitry,damage Operating Temperature Range 40Cto+125℃ may occur on devices subjected to high energy ESD. -65℃to+150℃ Therefore,proper ESD precautions should be taken to Storage Temperature Range avoid performance degradation or loss of functionality. Stresses above those listed under Absolute Maximum Ratings may cause permanent damage to the device.This is a stress rating only;functional operation of the device at these or any other conditions above those indicated in the operational section of this specification is not implied.Exposure to absolute maximum rating conditions for extended periods may affect device reliability. Rev.A|Page 5 of 20
ADIS16210 Rev. A | Page 5 of 20 ABSOLUTE MAXIMUM RATINGS Table 3. Parameter Rating Acceleration Any Axis, Unpowered 3500 g Any Axis, Powered 3500 g VDD to GND −0.3 V to +6.0 V Digital Input Voltage to GND −0.3 V to +5.3 V Digital Output Voltage to GND −0.3 V to VDD + 0.3 V Analog Inputs to GND −0.3 V to +3.6 V Operating Temperature Range −40°C to +125°C Storage Temperature Range −65°C to +150°C Stresses above those listed under Absolute Maximum Ratings may cause permanent damage to the device. This is a stress rating only; functional operation of the device at these or any other conditions above those indicated in the operational section of this specification is not implied. Exposure to absolute maximum rating conditions for extended periods may affect device reliability. Table 4. Package Characteristics Package Type θJA θJC Device Weight 15-Lead Module 31°C/W 11°C/W 7.2 grams ESD CAUTION