Optical MEMS Overview& MARS Modulator Joseph Ford, James Walker, Keith Goossen Lucent Technologies Bell Labs Innovations References: Silicon modulator based on mec hanically-active antire flection layer with 1 Mbit/sec capa bility K Goossen, J. Walker and S. Arney, IEEE Photonics Tech. Lett. 6, p 1119, 1994 Micromechanical fiber-optic attenuator with 3 microsecond response J. Ford, J. Walker, D. Greywall and K Goossen, IEEE J of Lightwave Tech 1609), 1663-1670, September 1998 Dynamic spectral power equalization using micro-opto-mechanics J. Ford and J. Walker, IEEE Photonics Technology Letters 10(10), 1440-1442, October 1998 Micromec hanical gain slope compensator for spectrally linear powerequalization K Goossen,J. Walker, D Neilson, J. Ford, w. Knox, IEEE Photonics Tech. Lett. 12(7), pp 831-833, July 2000 Wavelength add/drop switching using tilting micromirrors J. Ford, V. Aksyuk, D. Bishop and J. Walker, IEEE J of Lightwave Tech. 17(5),904-911, May 1999 A tunable dispersion compensating MEMS all-pass filter Madsen, Walker, Ford Goossen, Nielson, Lenz, IEEE Photonics Tech. Lett. 12(6), pp 651-653, June 2000
Optical MEMS: Overview & MARS Modulator Joseph Ford, James Walker, Keith Goossen References: “Silicon modulator based on mechanically-active antireflection layer with 1 Mbit/sec capability” K. Goossen, J. Walker and S. Arney, IEEE Photonics Tech. Lett. 6, p.1119, 1994 "Micromechanical fiber-optic attenuator with 3 microsecond response" J. Ford, J. Walker, D. Greywall and K. Goossen, IEEE J.of Lightwave Tech. 16(9), 1663-1670, September 1998 "Dynamic spectral power equalization using micro-opto-mechanics" J. Ford and J. Walker, IEEE Photonics Technology Letters 10(10), 1440-1442, October 1998 "Micromechanical gain slope compensator for spectrally linear power equalization" K. Goossen, J. Walker, D. Neilson, J. Ford, W. Knox, IEEE Photonics Tech. Lett.12(7), pp. 831-833, July 2000. "Wavelength add/drop switching using tilting micromirrors" J. Ford, V. Aksyuk, D. Bishop and J. Walker, IEEE J. of Lightwave Tech. 17(5), 904-911, May 1999. "A tunable dispersion compensating MEMS all-pass filter" Madsen, Walker, Ford. Goossen, Nielson, Lenz, IEEE Photonics Tech. Lett. 12(6), pp. 651-653, June 2000
What are MEMS? Micro-Electro-Mechanical Systems manufactured using technology created for VLSI electronics to build micron-scale devices released by selective etching Surface Micromachining ·LGA( electroforming) Deep Reactive lon Etching electrically controlled by Electrostatic attraction Electromagnetic force Photos courtesy Electrostriction Sandia National Labs Resistive heating Note:MEMS”≠ passive silicon v- grooves
What are MEMS? Micro-Electro-Mechanical Systems • Surface Micromachining • LIGA (electroforming) • Deep Reactive Ion Etching • Electrostatic attraction • Electromagnetic force • Electrostriction • Resistive heating Photos courtesy Sandia National Labs … manufactured using technology created for VLSI electronics to build micron-scale devices “released” by selective etching …& electrically controlled by Note: “MEMS” = passive silicon V-grooves
Mass commercial application: Acceleration Sensors Elastic hinge Proof mass Analog Devices' ADXL50 accelerometer Surface micromachining capacitive sensor Spacer 2.5x25 mm die incl. electronic controls Force Silicon substrate Cost: $30 vS -$300 bulk sensor( 93) Cut to $5/axis by 1998 Replaced by 3-axis ADXL 150 Capacitive Accelerometer 4mm CMOS Device area Micromechanical Device Area Mochanical circuit X-Axis Z-AxIs Ref. Circuit n-bpe silicon suberate Every new car sold has micromachined sensors on-board. They Y-Axi ange from MAP( Manifold Absolute Pressure)engine sensor accelerometers for active suspension systems, automatic door locks and antilock braking and airbag systems. The field is also widening considerably in other markets. Micromachined accelerometer sensors are now being used in seismic recording, machine monitoring, and circuitr Master: Clock diagnostic systems-or basically any application where gravity, shock, and vibration are http://w.analog.com/library/techarticles/mems/xlbckgdr4.html
Mass commercial application: Acceleration Sensors http://www.analog.com/library/techArticles/mems/xlbckgdr4.html Analog Devices' ADXL50 accelerometer Surface micromachining capacitive sensor 2.5 x 2.5 mm die incl. electronic controls Cost: $30 vs ~$300 bulk sensor (‘93) Cut to $5/axis by 1998 Replaced by 3-axis ADXL150 “Every new car sold has micromachined sensors on-board. They range from MAP (Manifold Absolute Pressure) engine sensors, accelerometers for active suspension systems, automatic door locks, and antilock braking and airbag systems. The field is also widening considerably in other markets. Micromachined accelerometer sensors are now being used in seismic recording, machine monitoring, and diagnostic systems - or basically any application where gravity, shock, and vibration are factors.” Capacitive Accelerometer Silicon substrate Elastic hinge Proof Mass Spacer Force
Mass commercial application: Pressure Sensors 51258023 s春币Pa13 Membrane RC time P Space Force Silicon substrate Capacitive Pressure Sensor Piezo-resistive pressure sensor High-pressure gas sensor (ceramic surface-mount NovaSensor's piezo-resistive pressure sensors Disposable medical sensor
Mass commercial application: Pressure Sensors Capacitive Pressure Sensor Silicon substrate Pint Pext Spacer Membrane Force Measure RC time NovaSensor’s piezo-resistive pressure sensors Disposable medical sensor High-pressure gas sensor (ceramic surface-mount) Piezo-resistive pressure sensor
Electrical actuation of active MEMS devices Force Apply Apply → EM coil Curren Electrostatic attraction Electromagnetic force Apply Voltage ↑ Force Apply Force Electrostriction Resistive heating
substrate magnetic layer EM coil conductive substrate conductive layer insulator substrate patterned resistive layer substrate electrostrictive layer Force Force Force Force Apply Current Apply Voltage Electrical actuation of active MEMS devices Electrostatic attraction Electrostriction Resistive heating Electromagnetic force Apply Current Apply Voltage