Number of squares R=2R S R=Rs/2 R=Rs/3 R=8R S R=6.5R Fall 2003-MA schmidt 3. 155J 6.152]-Lecture 6-Slide 6
Number of Squares R = 2RS R = R S/2 R = R S/3 R = 8RS R = 6.5RS Fall 2003 – M.A. Schmidt 3.155J/6.152J – Lecture 6 – Slide 6
Measurement of sheet resistance DO D D DA A A CB R′=V DC /AB DA /CB Fall 2003-MA schmidt 3. 155J 6.152]-Lecture 6-Slide 7
Measurement of Sheet Resistance + VDC A B D C IAB A B D C + - VDA ICB R’ = VDC / IAB R’’ = VDA / ICB Fall 2003 – M.A. Schmidt 3.155J/6.152J – Lecture 6 – Slide 7
Van der pauw R5=(π/n2)(R+R)fR/R) f(R/R") Correction factor Assumptions: Uniform thickness Continuous(no holes) 0.2 101001000 R/R Fall 2003-MA schmidt 3. 155J 6.152]-Lecture 6-Slide 8
Van der Pauw RS = ( π/ln2) ½ (R’+R’’) f(R’/R’’) f(R’/R’’) Correction Factor 1 Assumptions: Uniform thickness Continuous (no holes) 0.2 1 10 100 1000 R’/R’’ Fall 2003 – M.A. Schmidt 3.155J/6.152J – Lecture 6 – Slide 8