SERS Surface Enhanced Raman Spectroscopy RBS Rutherford Backscattering Spectrometry HEIS High-Energy Ion Scattering RHEED Reflected High Energy Electron Diffraction SREM Scanning Reflection Electron Microscopy SALI Surface Analysis by Laser Ionization PISIMS Post-Ionizat econdary Ion Mass St MPNRPI ntPost Ionization MRRPI Multipho on Re nt Post Ionization nt Post Ioniza MPI Multi-Photon Ionization SPI Single-Pho SIRIS er-nitiated Res SARIS TOFMS Time-of-Flight Mass Sp rometer SAM SEM SanniagbcroaM tron ndary Ele BsE SEMPA Secondary Electron Mic SEM AFM SPM Scan SIMS Spectrometry e SIMS ic SIMS SIMS using ass r SIMS ic SiMs Sector TOF.SIMS SIMS PISIMS -of-Flight Mass Spectrometer SIMS SNMS SNMSd Direct Bombardment Electron Gas SNMS SSMS Spark Source STEM See TEM STM Scanning Tunneling Microscopy xiv Acronyms Glossary
SERS Surface Enhanced Raman Spectroscopy Rutherford Backscattering Spectrometry High-Energy Ion Scattering Reflected High Energy Electron Diffraction Scanning Reflection Electron Microscopy Surfice Analysis by her Ionization Post-Ionization Secondary Ion Mass Spectrometry Multi-Photon Nonresonant Post Ionization Multiphoton Resonant Post Ionization Resonant Post Ionization Multi-Photon Ionization Single-Photon Ionization Sputter-Initiated Resonance Ionization Spectroscopy Surface Analysii by Resonant Ionization Spectroscopy Time-of-Flight Mass Spectrometer See AES Scanning Electron Microscopy Scanning Electron Microprobe Secondary Electron Miscroscopy Secondary Electron Backscattered Electron Secondary Electron Microscopy with Polarization Analysis Scanning Force Microscopy Scanning Force Microscope Atomic Force Microscopy Scanning Probe Microscopy Secondary Ion Mass Spectrometry Dynamic Secondary Ion Mass Spectrometry Static Secondary Ion Mass Spectrometry SIMS using a Quadruple Mass Spectrometer SIMS using a Magnetic Sector Mass Spectrometer See Magnetic SIMS SIMS using Tune-of-Flight Mass Spectrometer Post Ionization SIMS Sputtered Neutrals Mass Spectrometry Secondary Neutrals Mass Spectrometry Direct Bombardment Electron Gas SNMS Spark Source Mass Spectrometry Spark Source Mass Spectrometry See TEM Scanning Tunneling Microscopy RBS HEIS WEED SREM SAL1 PISIMS MPNRPI MRRPI RPI MPI SPI SINS SARIS TOFMS SAM SEM SE BSE SEMPA SFM AFM SPM SIMS Dynamic SIMS Static SIMS Magnetic SIMS Sector SIMS TOF-SIMS PISIMS Q-SIMS SNMS SNMSd SSMS Spark Source STEM STM xiv Acronyms Glossary
SPM TEAS Thermal Energy Atom Scattering TEM CTEM Conventional Transmission Electron Microscopy STEM Scanning Transmission Electron Microscopy HRTEM High Resolution Transmission Electron Microscopy SAD Selected area diffraction AEM Analytical Electron Microscopy CBED Convergent Beam Electron Diffraction LTEM Lorentz Transmission Electron Microscopy TLC Thin Layer Chromatography ected-Light croscope TXRF See XRF UPS Ultraviolet Photoelectron Spectroscopy Ultraviolet Photoemission Spectroscopy MPS Molecular Photoelectron Spectroscopy VASE Variable Angle Spectroscopic Ellipsometry WDS WDX Wavelength Dispersive X-Ray Spectroscopy XAS X-Ray Absorption Spectroscopy XPS X-Ray Photoelectron Spectroscopy X-Ray Photoemission Spectroscopy ESCA Flectron Spectroscopy for Chemical Analysis XPD X-Ray Photoelectron Diffraction PHD Photoelectron Diffraction KE Kinetic Energy XRD X-RayDiffraction GIXD Grazing Incidence X-Ray Diffraction GIXRD Grazing Incidence X-Ray Diffraction DCD Double Crystal Diffractometer XRF X-Ray Fluorescence XFS X-Ray Fluorescence Spectroscopy TXRF Total Reflection X-Ray Fluorescence TRXFR Total Reflection X-Ray Fluorescence VPD-TXRF Vapor Phase Decomposition Total X-Ray Fluorescence Acronyms Glossary xv
SPM Scanning Tunneling Microscope Scanning Probe Microscopy Thermal Energy Atom Scattering Transmission Electron Microscopy Transmission Electron Microscope Conventional Transmission Electron Microscopy Scanning Transmission Electron Microscopy High Resolution Transmission Electron Microscopy Selected Area Diffraction Analytical Electron Microscopy Convergent Beam Electron Diffraction Lorentz Transmission Electron Microscopy Thin Layer Chromatography Tandem Scanning Reflected-Light Microscope Tandem Scanning Reflected-Light Microscope See XRF TEAS TEM CTEM STEM HRTEM SAD AEM CBED LTEM TLC TSRLM TSM TXRF UPS MPS VASE WDS WDX XAS XPS ESCA XPD PHD KE XRD GIXD GIXRD DCD XRF XFS TXRF TRXFR VPD-TXRF Ultraviolet Photoelectron Spectroscopy Ultraviolet Photoemission Spectroscopy Molecular Photoelectron Spectroscopy Variable Angle Spectroscopic Ellipsometry Wavelength Dispersive &-Ray) Spectroscopy Wavelength Dispersive X-Ray Spectroscopy X-Ray Absorption Spectroscopy X-Ray Photoelectron Spectroscopy X-Ray Photoemission Spectroscopy Electron Spectroscopy for Chemical Analysis X-Ray Photoelectron Diffraction Photoelectron Diffraction Kinetic Energy X-RayDiffraction Grazing Incidence X-Ray Diffraction Grazing Incidence X-Ray Diffraction Double Crystal Diffractometer X-Ray Fluorescence X-Ray Fluorescence Spectroscopy Total Reflection X-Ray Fluorescence Total Reflection X-Ray Fluorescence Vapor Phase Decomposition Total X-Ray Fluorescence Acronyms Glossan/ xv
Contributors Mark R.Antonio Extended X-Ray Absorption Fine Structure J.E.E.Baglin Elastic Recoil Spectrometry Research Center Scott Baumann Rutherford Backscattering Spectrometry Christopher H.Becker Surface Analysis by laser lonization Menlo Park.CA Albert J.Bevolo Reflected Electron Energy-Loss Spectroscopy Ames L Scanning Electron Microscopy Allentown.PA Redwood Ciry,CA San lose.CA Nudear Reaction Analyi Troy,NY s Associate Carl Colvard s&Assoociates I.Neal Cox Fourier Transform Infrared Spectroscopy ohn Gusta Delly Light Microscopy Crone xvi
Mark R Antonio BP Research International Cleveland, OH J. E. E. Bagh IBM Alrnaden Research Center San Jose, CA Scott Baumann Charles Evans &Associates Redwood City, CA Christopher H. Becker SRI International Menlo Park, CA Albert J. Bevolo Ames Laboratory, Iowa State University Ames, IA J. B. Bindell AT&T Bell Laboratories Allentown, PA Filippo Radicati di Brozolo Charles Evans &Associates Redwood City, CA C. R Brundle IBM Almaden Research Center San Jose, CA Daniele Cherniak Rennsselaer Polytechnic Institute Troy, NY Paul Chu Charles Evans & Associates Redwood City, CA Carl Colvard Charles Evans & Assoociates Redwood City, CA J. Neal Cox INTEL, Components Research Santa Clara, CA John Gustav Delly McCrone Research Institute Chicago, IL Extended X-Ray Absorption Fine Structure Elastic Recoil Spectrometry Rutherford Backscattering Spectrometry Surface Analysis by Laser Ionization Reflected Electron Energy-Loss Spectro~copy Scanning Electron Microscopy Laser Ionizarion Mass Spectrometry X-Ray Photoelectron Spectroscopy; Ultraviolet Photoelectron Spectroscopy Nuclear Reaction Analysis Dynamic Secondary Ion Mass Spectrometry Photoluminescence Fourier Transform Infrared Spectroscopy Light Microscopy xvi
Solid State Nucear Magnetic Resonanc of Califoria,Santa Barbara Santa Barbara,CA Toral Reflection X-Ray Fluorescen Munich Scatering with Piscataway,N] Magneto-Optic Kerr Rotation San Jose,CA Roy H.Geiss Energy-Dispersive X-Ray Spectroscopy IBM Alma den Research Center San Jose,CA Torgny Gustafsso Mediumn-Ene Ion Scattering With Channeling and Blocking William L.Harrington Spark Source Mass Spectrometry .N] Brent D.Hermsmeie X-Ray Pho oelectron and Auger Electron Diffraction San Jose K.C.Hickman Optical Scatterometry Tim Z.Hossain Neutron Activation Analysis Rebecca S.Howland ohn C.Huncke y.CA X-Ray Fluorescence San Jose,CA Michael D.Kirk Park Scientific Instruments Sunnyvale,CA Contributors xvil
Hellmut F.ckert University of California, Santa Barbara Santa Barbara, CA Peter Eichinger GeMeTec Analysis Munich P. Fenter Rutgers University Piscataway, NJ David E. Fowler IBM Almaden Research Center San Jose, CA S. M. Gaspar University of New Mexico Albuquerque,NM ROY H. Geiss IBM Almaden Research Center San Jose, CA Torgny Gustafsson Rutgers University Piscataway, NJ William L. Harrington Evans Fast Plainsboro, NJ Brent D. Hermsmeier IBM Almaden Research Center San Jose, CA K.C. Hidunan University of New Mexico Albuquerque, NM Tim Z. Hossain Cornell University Ithica, NY Rebecca S. Howland Park Scientific Instruments Sunnyvale, CA John C. Huneke Charles Evans & Assodates Redwood City, CA Ting C. Huang IBM Almaden Research Center San Jose, CA William Katz Evans Central Minnetonka, MN Michael D. Kirk Park Scientific Instruments Sunnyvale, CA Solid State Nuclear Magnetic Resonance Total Reflection X-Ray Fluorescence Medium-Energy Ion Scattering with Channeling and Blocking Magneto-optic Kerr Rotation Optical Scatterometry Energy-Dispersive X-Ray Spectroscopy Medium-Energy Ion Scattefmg With Channeling and Blocking Spark Source Mass Spectromeuy X-Ray Photoelectron and Auger Electron Diffraction Optical Scatterometry Neutron Activation Analysis Scanning Tunneling Microscopy and Scanning Force Microscorn Sputtered Neutral Mass Spectrometry, Glow-Discharge Mass Spectrometry X-Ray Fluorescence Static Secondary Ion Mass Spectrometry Scanning Tunneling Microscopy and Scanning Force Microscopy Contributors xvii
Bruce E.Koel High-Resolution Electron Energy Loss Spectrometry Max G.Lagally Low-Energy Electron Diffraction W.A.Lanford Nuclear Reaction Analysis Albany,NY sity of New York, Charles E Lyman Scanning Transmission Electron Microscopy Susan MacKay Surface Analysis by laser lonization Eden Prairie.MN John R.MeNeil Optical Scatterometry Ronald G.Musket Particle-Induced X-Ray Emission .5.H.Navi Optical Scatterometry Electron Probe X-Ray Microanalysis Gaithenburg.MD Daresbury,Cheshire Columbus,OH Modulation Spectroscopy NCLCNT CUNY Neutron Reflectivity den Research Center San Jose,CA Donald E.Sa Kurt E.Sickafus Transmission Electron Microscopy Paul G.Snyde Variable Angle Spectroscopic Ellipsometry xvill Contributors
Bruce E. Koel University of Southern California Los Angles, CA Max G. Lagally University of Wmnsin, Madison, WI W. A. Lanford State University of New York, Albany, NY Charles E. Lyman Lehigh University Bethlehem, PA Susan MacKay Perkin Elmer Eden Prairie, MN John R McNeil University of New Mexico Albuquerque, NM Ronald G. Musket Lawrence Livermore National Laboratory Livermore, (=A S. S. H. Naqvi Universiy of New Mexico Albuquerque, NM Dale E. Newbury National Institutes of Science and Technology Gairhersburg, MD David Norman SERC Daresbury Laboratory Daresbury, Cheshire John W. Olesik Ohio State University Columbus, OH Fred H. Pollak Brooklyn College, CUNY New York, NY Thomas P. Russell IBM Alden Research Center San Jose, CA Donald E. Savage University of Wisconsin Madison, WI Kurt E. Si& Los Alamos National Laboratory LosAlamos,NM Paul G. Snyder University of Nebraska Lincoln, NE High-Resolution Electron Energy Loss Spectrometry Low-Energy Electron Diffraction Nudear Reaction Analysis Scanning Transmission Electron Microscopy Surface Analysis by Laser Ionization Optical Scatterometry Partide-Induced X-Ray Emission Optical Scatterometry Electron Probe X-Ray Microanalysis Surface Extended X-Ray Absorption Fine Structure, Near Edge X-Ray Absorption Fine Structure Inductively Coupled Plasma-Optical Emission Spectroscopy Modulation spectroscopy Neutron Reflectivity Reflection High-Energy Electron Diffraction Transmission Elmn Microscopy Variable Angle Spectroscopic Ellipsometry xviii Contributors