1D atom probe tomography (APT) Pulsed field evaporation provides precise control over the instant in time of the departure of the ion from the tip's surface. The time-of-flight of (ToF)the ion is related Image gas atom MCP Phosphor screen to the mass-to-charge ratio of the ion: Probe hole Reflectron dn WI m 2e n 12 Start signal Stop signal MCP detector Equally sensitive to HVHV pulser 8ch Timer C both light and heavy Interface Personal Computer element. 11 K.Hono /Progress in Materials Science 47(2002)621-729
Image gas atom FIM tip MCP Phosphor screen Probe hole Reflectron MCP detector Start signal Stop signal 2 2 2 Vt l e n m = 1D atom probe tomography (APT) The time-of-flight of (ToF) the ion is related to the mass-to-charge ratio of the ion: K. Hono /Progress in Materials Science 47 (2002) 621–729 Pulsed field evaporation provides precise control over the instant in time of the departure of the ion from the tip’s surface. Equally sensitive to both light and heavy element. 11
1D atom probe tomography (APT) Precipitate particles Interface ce Inte Probe hole ±20 Depth 250- 200- 150- 100- Al 0 Ni 50- K.Hono /Progress in 7 Materials Science 47 0 200 400 600 800 1000 (2002)621-72912 Total Number of Detected lons
Precipitate particles Probe hole 1D atom probe tomography (APT) 12 K. Hono /Progress in Materials Science 47 (2002) 621–729
3D atom probe in 90's Delay-line Detector(DLD) tMCP 二维阵列延迟线检测器 MCP DLD MCP Delay line Ty2 +X TX1 8 88 Metal cation. a o -X=0 HV HV pulser 1=0 -X Tx2 TX2 1kV x=Tx1-Tx2,y=Ty1-Ty2 13 Courtesy:K.Hono from NIMS
1 kV Metal cation HV HV pulser P C MCP DLD tMCP t1 t2 t3 t4 t = 0 Delay-line Detector (DLD) 𝑥 = 𝑇𝑥1 − 𝑇𝑥2, 𝑦 = 𝑇𝑦1 − 𝑇𝑦2 3D atom probe in 90’s Courtesy: K. Hono from NIMS 13 二维阵列延迟线检测器
3D reconstruction Detector Zd 2 Specimen (④ (x,y) Az GD (⑧ ④ 93 ④ ② 20 15 10 5 。=a-+-是2+(--+) 1 CA 14
( ) ( ( )) 2 2 2 1 1 1 d t t i i n i D i n r r x y A z n z z + − − + = − + = − = n 3D reconstruction 14