电子枪 聚光镜光阑 物镜可动光阑 显示器 探测器 轨迹球 HITACH 样品仓 旋钮板 型6
电子枪 样品仓 物镜可动光阑 显示器 轨迹球 旋钮板 扫描电镜的结构和工作原理 聚光镜光阑 探测器
anode zoom condenser lens aperture super conical objective lens Pole piece 17
SEM condenser and objective lenses in JEOL-6480LV 17 Pole piece
·SEs and BSEs O dX-xo detectors Pole ·An Everhart Thornley detector(ETD)is Robinson backe electron del tor the standard detector used in SEMs and was developed in the mid 1960s. Everhart-Thomley Chamberscope Vacuum Gauge dary electron detector 18
Detectors • SEs and BSEs detectors • An Everhart Thornley detector (ETD) is the standard detector used in SEMs and was developed in the mid 1960s. 18
Final lens pole piece Backscattered electrons Secondary electrons Faraday Cage(+200V) Aluminum coating on scinillator (+12kW) Specimen Photomultiplier Secondary electron Light Photocathode collector guide 19
SEs Detector 19
Direct electron Objective beam lens BSE Incident electron beam Detector Backscattered_ electron detector 3 Electron scatter Backscattered from electrons Sample Sample(S) Container Specimen 20
BSEs detector 20