2.L0w-k材料分类 Average pore size RTE Closed porosity Pore size distribution RTE Cap Average pore size Porous low-k 15715.71 Per colation thin films threshold Metal diffusion Metal Continuity Barrier Thermal stability Open porosity Conformality uoye.uI Plasma Structural change exposure of the low-k films PDF文件使用"pdfFactory”试用版本创建ww.fineprint.cn
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Classification of Low k Dielectrics Material k=4.1 k=3.5 k=2.6-3.2 k=2.0.2.5 Process Vendor Sio2 CVD Inorganic F-SiO2 CVD FOx XLK Spin-on Dow Corning LKD-2020 LKD-5109 Spin-on JSR IPS2.5 uPLK Spin-on CCIC HOSP Nanoglass-E Spin-on Honeywell PPSZ-M Spin-on Clariant ALCAP-S Spin-on Asahi Chemical Hybrid HSG RZ26 HSG 6210 Spin-on Hitachi Chemical OCD OCL Spin-on Tokyo Ohka Zircom Spin-on Shipley BlackDiamond BlackDiamond 2 CVD Applied Materials CORAL POLA CVD Novellus FlowFill Orion CVD Trikon SiLK Nautilus Spin-on Dow Chemical Organic ？ Spin-on Sumitomo Bakelite FLARE FLARE GX3 Spin-on Honeywell PDF文件使用"pdfFactory”试用版本创建w,fineprint.cn
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Low-K Dielectric Product Deposition Suppliers/Sources Dielectric Materials Constant Name Method Users Fluorinated SiO, 3.2-3.6 FSG PECVD or AMAT,Novellus HDP-CVD Mattson,WJ,TEL Silsesquioxane 2.5-3.0 HOSP/LOSP SOD AlliedSignal FOX/HSQ SOD Dow Coming Flowfill CVD Trikon Black Diamond CVD AMAT 3MS CVD Dow Corning 4MS CVD Schumacher/NVLS Poly(arylene ether) 2.6-2.8 SiLK SOD Dow Chemical FLARE SOD AlliedSignal Velox SOD Schumacher Parylene 2.2-2.9 Parylene-N CVD PRI,TI,Mattson Parylene-AF4 CVD Novellus/TI Fluoro-Polymer 1.9-2.0 PTFE SOD Gore Fluorinated 2.0-2.6 a-F:C/FLAC CVD Novellus,AMAT Amorphous Carbon NEC,Sharp MIT,UT Arlington Diamondlike Carbon 2.4-2.8 DLC CVD IBM Porous Silica 1.2-2.3 Nanoglass SOD AlliedSignal,TI,... Mesoporous Silica SOD SNL,PNNL Porous Silsesquioxane SOD IBM,Gatech Porous Polyimide Nanofoam SOD IBM Porous Poly(arylene ether) SOD UCLA/CNXT Air Bridge 1.0 PDF文件使用"pdfFactory”试用版本创建www.fineprint.cn
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Low-k SSQ: Silsesquioxane materials HSSQ: Hydrogen-SSQ MSSQ: Methyl-SSQ Non-Si Si-based Silican-based SSO-based Polvmers SiOF HSSQ amorphous carbon SiOCF MSSO PDF文件使用"pdfFactory”试用版本创建www.fineprint.cn
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Porous HSQ Porous MSQ Porous CVD Quantitative Quantitative Semi-quantitative Porous HSQ TTTTTT ◆-Porous HSQ 40x10 Porous HSQ -Porous MSQ Porous MSQ Porous CVD Porous CVD 03 30 Porous CVD 巴 02 01 Closed symbol:adsorption Open symbol:desorption Line fitting curves 0.020.040.060.080.100.120.14 0.0 0.2 0,4 060.8 10 5 10 15 25 30 (PIPoc Pore size (A) PDF文件使用"pdfFactory”试用版本创建w.fineprint.cn
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