Scanning Probe Microscope(SPM) Lithography Or Scanning Probe Lithography (SPl) Scanning Probe Microscope tip, such as an Atomic Force Microscope(AFM)or Scanning Tunneling Microscope(STM)tip, is used to locally modify a surface, much like a pen or knife
Scanning Probe Microscope (SPM) Lithography Or Scanning Probe Lithography (SPL) A Scanning Probe Microscope tip, such as an Atomic Force Microscope (AFM) or Scanning Tunneling Microscope (STM) tip, is used to locally modify a surface, much like a pen or knife
Scanning Probe Lithography(SPL) Mechanical scratchin Anodization of si surface Electrochemical decomposition of self-assembled monolayer Electrofield induced chemical reaction Electrochemical reaction in solution using protected STM tips Optical or Optical-Assisted Lithography AFMDip-Pen Nanolithography DPN)
Scanning Probe Lithography (SPL) • Mechanical scratching •Anodization of Si surface • Electrochemical decomposition of self-assembled monolayer • Electrofield induced chemical reaction • Electrochemical reaction in solution using protected STM tips •Optical or Optical-Assisted Lithography • AFM Dip-Pen Nanolithography (DPN)
A 1 8 0 2 Llm Mechanical Modification of Surface modification by STM Surface with AFM Tip tip with a voltage and current line spacing is 3nm
Surface modification by STM tip with a voltage and current, line spacing is 3nm Mechanical Modification of Surface with AFM Tip
0 5nn Line pattern created by Surface oxidation of silicon NSOM-based Lithography surface by STM
Line pattern created by NSOM-based Lithography Surface oxidation of silicon surface by STM
A 0.20.406pum 35KX35,0001umWD16 Ag line obtained by electrochemical reduction SEM image of chromium of Agt in solution with Lines created by STM
Ag line obtained by electrochemical reduction of Ag+ in solution with STM SEM image of Chromium Lines created by…