Ro 0.612λ 二 M nsina B B (a) ) (c) 16
16
222nm 182nm 171nm Rayleigh limit Abbe limit Sparrow limit d=061w NA d=050h NA d=0474 NA A=510 nm NA=14
透镜的分辨率极限 Ro 0.6122 M nsina nsina.数值孔径(numerical aperture,NA) Visible Light:~6000 A X-rays: λ0.5-2.5A Electrons: λ~0.05 18
透镜的分辨率极限 18 nsin: 数值孔径(numerical aperture, NA)