Resistance extraction all these methods calculate dc resistance a Suitable for local interconnects with small dimensions, or analysis under lower frequency OR at high frequency: estimated with skin depth for simple geometry; extracted with complex methods along with L Reference a W. Kao, C-Y Lo, M. Basel and R. Singh, "Parasitic extraction Current state of the art and future trends, Proceedings of eee, vol 89,pp.729739,2001 a Xiren Wang, Deyan Liu, Wenjian Yu and Zeyi Wang, " Improved boundary element method for fast 3-D interconnect resistance extraction, "IEICE Trans. on Electronics, Vol. E88-C, No. 2, pp 232 240.Feb.2005 16
16 ◼ All these methods calculate DC resistance Suitable for local interconnects with small dimensions, or analysis under lower frequency R at high frequency: estimated with skin depth for simple geometry; extracted with complex methods along with L ◼ Reference W. Kao, C-Y. Lo, M. Basel and R. Singh, “Parasitic extraction: Current state of the art and future trends, ” Proceedings of IEEE, vol. 89, pp. 729-739, 2001. Xiren Wang, Deyan Liu, Wenjian Yu and Zeyi Wang, "Improved boundary element method for fast 3-D interconnect resistance extraction," IEICE Trans. on Electronics, Vol. E88-C, No.2, pp.232- 240, Feb. 2005. Resistance extraction
Ca apacitance Extraction 17
17 Capacitance Extraction
Outline a Introduction to parasitic extraction Resistance extraction a Capacitance extraction a Fundamentals and survey a Volume discretization method a Boundary element method Inductance and rlc extraction 18
18 Outline ◼ Introduction to parasitic extraction ◼ Resistance extraction ◼ Capacitance extraction Fundamentals and survey Volume discretization method Boundary element method ◼ Inductance and RLC extraction
Capacitance extraction ■Prob| em formulation D A parallel-plate capacitor Voltage:卩=n-n Q and-Q are induced on both plates; Q is proportional to V The ratio is defined as c: C=Q/V If the dimension of the plate is large compared with spacing d, EE S =885×102C2/N.m 4丌×9×10 a Other familiar capacitors interdigital capacitor coaxial capacitor 19
19 ◼ Problem formulation A parallel-plate capacitor ◼ Voltage: ◼ Q and –Q are induced on both plates; Q is proportional to V ◼ The ratio is defined as C: C=Q/V ◼ If the dimension of the plate is large compared with spacing d, Other familiar capacitors Capacitance extraction V = − 1 2 coaxial capacitor interdigital capacitor