AP5301/8301Instrumental Methods of Analysis
1 AP 5301 / 8301 Instrumental Methods of Analysis
Reference BooksEnevclopedia of Materials Characterization.C.Richard BrundleCharles AEvans,Jr.,and Shaun Wilson (Editors),Butterworth-Heinemann(1992)X-Ray Microanalysis in the Electron Microscopy (4th Edition),J.AChandler,North Holland (1987)Methods of Surface Analysis: Techniques and Applications, J.M.EWalls(Editor),Cambridge UniversityPress(1990)Secondary Ion Mass Spectrometry,Benninghoven,Rudenauer, andWernerJohnWiley&Sons (1987)Surface Analytical Techniques, J. C.Riviere, Oxford University Press(1990)Modern Techniques of Surface Science,D.P.Woodruff and T.ADelchar, Cambridge University Press (1994)Analysis of Microelectronic Material Devices, M.Grasserbauer and HW. Werner (Editors), John Wiley & Sons (1991)Scanning Electron Microscopy and X-Ray Analysis (3rd Edition),JGoldstein, D. Newbury, D. Joy, C. Lyman, P. Echlin, E. Lifshin, L.Sawyer, and J. Michael, Kluwer (2003)2
2 • Encyclopedia of Materials Characterization, C. Richard Brundle, Charles A. Evans, Jr., and Shaun Wilson (Editors), ButterworthHeinemann (1992) • X-Ray Microanalysis in the Electron Microscopy (4th Edition), J. A. Chandler, North Holland (1987) • Methods of Surface Analysis: Techniques and Applications, J. M. E. Walls (Editor), Cambridge University Press (1990) • Secondary Ion Mass Spectrometry, Benninghoven, Rudenauer, and Werner, John Wiley & Sons (1987) • Surface Analytical Techniques, J. C. Riviere, Oxford University Press (1990) • Modern Techniques of Surface Science, D. P. Woodruff and T. A. Delchar, Cambridge University Press (1994) • Analysis of Microelectronic Material Devices, M. Grasserbauer and H. W. Werner (Editors), John Wiley & Sons (1991) • Scanning Electron Microscopy and X-Ray Analysis (3rd Edition), J. Goldstein, D. Newbury, D. Joy, C. Lyman, P. Echlin, E. Lifshin, L. Sawyer, and J. Michael, Kluwer (2003) Reference Books
CourseObjectivesBasic understanding of materials characterizationtechniquesEmphasisonapplications3
3 COURSE OBJECTIVES • Basic understanding of materials characterization techniques • Emphasis on applications Course Objectives
Classification of CharacterizationTechniquesMicroscopictechniquesSurfacetechniquesDepth profiling techniquesSpectroscopic techniquesElectrical techniques
4 Classification of Characterization Techniques • Microscopic techniques • Surface techniques • Depth profiling techniques • Spectroscopic techniques • Electrical techniques
Microscopy andRelated TechniquesOptical MicroscopyScanning Electron Microscopy (SEM)/EnergyDispersive X-Ray Spectroscopy (EDS)/Wavelength-Dispersive X-Ray Spectroscopy(WDS)/X-rayDiffraction (XRD)Transmission Electron Microscopy (TEM)/Scanning Transmission Electron Microscopy(STEM) / Electron Diffraction (ED)5
5 • Optical Microscopy • Scanning Electron Microscopy (SEM) / EnergyDispersive X-Ray Spectroscopy (EDS) / Wavelength-Dispersive X-Ray Spectroscopy (WDS) / X-ray Diffraction (XRD) • Transmission Electron Microscopy (TEM) / Scanning Transmission Electron Microscopy (STEM) / Electron Diffraction (ED) Microscopy and Related Techniques