Surface Characterization TechniquesAugerElectron Spectroscopy(AES)·X-ray Photoelectron Spectroscopy (XPS)Scanning Probe Microscopy(SPM)-ScanningTunneling Microscopy (STM), Atomic ForceMicroscopy (AFM),6
6 • Auger Electron Spectroscopy (AES) • X-ray Photoelectron Spectroscopy (XPS) • Scanning Probe Microscopy (SPM) – Scanning Tunneling Microscopy (STM), Atomic Force Microscopy (AFM), . Surface Characterization Techniques
Depth Profiling Techniques·AugerElectron Spectroscopy(AES)X-RayPhotoelectron Spectroscopy XPS)Secondary Ion Mass Spectrometry (SIMS)Rutherford Backscattering Spectrometry(RBS)· Capacitance-Voltage (CV) Measurement7
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