对于一个干净的、精心设计的并且经过仔细检验的真空系统来说，放气是系统流入质量的主要部分。 材料表面的平均放气速率* Outgassing rates in torrliter/sec cm2 Exposure to vacuum Surface Condition 1 hour 10 hours >24 hrs untreated degreased polished baked Aluminum (anodized) 3x10-5 3x10-7 8x10-8 3x10-5 3x10-5 N/A 5x10-10 Aluminum 8x10-7 5x10-8 1x10-10 8x10-7 1x10-8 1x10-8 5x10-13 Brass 2x10-6 6x10-7 1x10-7 1x10-6 1x10-6 8x10-6 N/A Beryllium 1x10-6 5x10-7 1x10-9 1x10-6 5x10-7 1x10-6 N/A Copper 1x10-7 5x10-9 1x10-10 1x10-7 1x10-8 1x10-9 1x10-12 Copper(OFHC) 8x10-9 2x10-9 3x10-11 8x10-9 8x10-9 5x10-7 1x10-12 Delrin 6x10-6 1x10-7 7x10-7 6x10-6 not available not available 8x10-7 Lead 1x10-7 2x10-8 4x10-9 1x10-8 5x10-8 1x10-8 N/A Mild Steel 2x10-6 2x10-7 3x108 2x10-6 5x10-7 5x10-8 5x10-10 1018 Steel (Ni plated) 2x10-6 5x10-7 1x10-8 not available not available not available not available Gold Sheet 8x10-8 not available 5x10-9 8x10-8 1x10-8 not available not available Titanium 1x10-9 not available 5x10-10 1x10-9 not available not available 2x10-12 Stainless steel 5x10-8 1x10-8 1x10-1o 7x10-8 1x10-9 5x10-9 3x10-13 *Rates can vary significantly,depending on pre-cleaning and preparation methods,and system history
1 hour 10 hours >24 hrs untreated degreased polished baked Aluminum (anodized) Aluminum Brass Beryllium Copper Copper (OFHC) Delrin Lead Mild Steel 1018 Steel (Ni plated) Gold Sheet Titanium Stainless steel 3x10-5 8x10-7 2x10-6 1x10-6 1x10-7 8x10-9 6x10-6 1x10-7 2x10-6 2x10-6 8x10-8 1x10-9 5x10-8 3x10-7 5x10-8 6x10-7 5x10-7 5x10-9 2x10-9 1x10-7 2x10-8 2x10-7 5x10-7 not available not available 1x10-8 8x10-8 1x10-10 1x10-7 1x10-9 1x10-10 3x10-11 7x10-7 4x10-9 3x108 1x10-8 5x10-9 5x10-10 1x10-10 3x10-5 8x10-7 1x10-6 1x10-6 1x10-7 8x10-9 6x10-6 1x10-8 2x10-6 not available 8x10-8 1x10-9 7x10-8 3x10-5 1x10-8 1x10-6 5x10-7 1x10-8 8x10-9 not available 5x10-8 5x10-7 not available 1x10-8 not available 1x10-9 N/A 1x10-8 8x10-6 1x10-6 1x10-9 5x10-7 not available 1x10-8 5x10-8 not available not available not available 5x10-9 5x10-10 5x10-13 N/A N/A 1x10-12 1x10-12 8x10-7 N/A 5x10-10 not available not available 2x10-12 3x10-13 Exposure to vacuum Surface Condition *Rates can vary significantly, depending on pre-cleaning and preparation methods, and system history 材料表面的平均放气速率* Outgassing rates in torrliter/sec cm2 对于一个干净的、精心设计的并且经过仔细检验的真空系统来说,放气是系统流入质量的主要部分
材料表面的平均放气速率* Outgassing rates in torrliter/sec cm2 Exposure to vacuum Surface Condition 1 hour 10 hours >24 hrs untreated degreased polished baked Epoxy (Shell Epon) 2x10-5 1x106 not available not available not available N/A 8x10-8 Buna N 8x10-6 2x10-6 8x10-7 8x10-6 8x10-7 N/A 4x10-8 Neoprene 3x10-6 8x10-7 4x10-8 3x10-6 6x10-7 N/A 2x10-9 Mylar 8x10-7 1x10-7 7x10-9 8x10-7 N/A N/A 2x10-9 Acrylic 2x10-6 1x10-6 5x10-7 2x10-6 8x10-7 N/A 1x10-8 Teflon (poly'fluoro'lene) 2x10-7 8x10-8 2x10-8 2x10-7 N/A N/A 8x10-9 Nylon (polyamide) 5x10-6 3x10-7 4x10-8 5x10-6 N/A N/A 6x10-9 Lexan(polycarbonate) 7x10-7 2x10-7 6x10-8 1x10-7 N/A N/A 8x10-9 PVC 5x10-7 3x10-7 1x10-7 5x10-7 N/A N/A 8x10-8 Silicon rubber 7x10-6 8x10-7 6x10-8 7x10-7 2x10-7 N/A 6x10-10 Silastic (sealant) 5x10-5 3x10-6 6x10-7 8x10-5 N/A N/A 5x10-8 Viton 8x10-7 5x10-8 2x10-8 8x10-7 1x10-7 N/A 5x10-10 Steatite (ceramic) 5x10-8 1x10-8 7x10-9 N/A N/A N/A N/A Pyrex (7740) 1x10-7 2x10-8 5x10-9 not available not available N/A 2x10-9 *Rates can vary significantly,depending on pre-cleaning and preparation methods,and system history
1 hour 10 hours >24 hrs untreated degreased polished baked Epoxy (Shell Epon) 2x10 -5 1x10 -6 not available not available not available N/A 8x10-8 Buna N Neoprene Mylar Acrylic Teflon (poly’fluoro’lene) Nylon (polyamide) Lexan (polycarbonate) PVC Silicon rubber Silastic (sealant) Viton Steatite (ceramic) Pyrex (7740) 8x10-6 3x10-6 8x10-7 2x10-6 2x10-7 5x10-6 7x10-7 5x10-7 7x10-6 5x10-5 8x10-7 5x10-8 1x10-7 2x10-6 8x10-7 1x10-7 1x10-6 8x10-8 3x10-7 2x10-7 3x10-7 8x10-7 3x10-6 5x10-8 1x10-8 2x10-8 8x10-7 4x10-8 7x10-9 5x10-7 2x10-8 4x10-8 6x10-8 1x10-7 6x10-8 6x10-7 2x10-8 7x10-9 5x10-9 8x10-6 3x10-6 8x10-7 2x10-6 2x10-7 5x10-6 1x10-7 5x10-7 7x10-7 8x10-5 8x10-7 N/A not available 8x10-7 6x10-7 N/A 8x10-7 N/A N/A N/A N/A 2x10-7 N/A 1x10-7 N/A not available N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A 4x10-8 2x10-9 2x10-9 1x10-8 8x10-9 6x10-9 8x10-9 8x10-8 6x10-10 5x10-8 5x10-10 N/A 2x10-9 Exposure to vacuum Surface Condition *Rates can vary significantly, depending on pre-cleaning and preparation methods, and system history. 材料表面的平均放气速率* Outgassing rates in torrliter/sec cm2
10-3 10 7 9、 12 10 4 18 10-5 6 13 10-6 2 0.1 1.0 10 100 t/h 常见低温材料的比表面真空放气率 1一环氧树脂 2一玻璃纤维布（未处理） 3一喷铝涤纶薄 膜（用丙酮清洗过)4一喷铝涤纶薄膜（未作处理过） 5一玻璃布（用丙酮清洗3小时后）6一玻璃纤维7一聚酰 亚胺8一聚氯乙烯9一特氟隆10一聚酰亚胺（研磨过） 11一聚乙烯12一环氧玻璃钢 13一聚醋酸乙烯脂