Phase Shift Mask PatterningNormal MaskPhaseShiftMaskPhase shiftConstructivecoating-Total LightInterferenceIntensityTotal LightDestructiveIntensityInterferencePRPRSubstrateSubstrateFinalPatternFinal PatternPRPRSubstrateSubstrateDesignedPatternDesignedPattern
Isotropic etchingAnisotropic etchingphotoresistphotoresistSio,Sio,photoresistphotoresistSioSio,SioSiO