Contact PrinterLight SourceLensesMaskPhotoresistWafer
Contact Printer
Proximity PrinterLight SorceLeSesMask10PhotoresistWafer
Proximity Printer
Light Diffraction Without LensMaskDiffracted lightIntensityoftheprojected light
Light Diffraction Without Lens
Step and Repeat Alignment SystemLight SourceReference MarkAligmnentLaserReticle StageRetieleInterferometerLserProjectionLensXInterferometerMirror SetWafer98Hong Xiuo, Ph.DWWLWafer Stage
Step and Repeat Alignment System
Wafers are being loaded into a stepper in a clean room.SlepperStep