Yirtual Source First Condenser Lens Condenser Aperture Second Condenser Lens Objective Aperture ☒☒ Scan Coils Objective Lens Scanning electron microscopy Sample Lanting Zhang School of Materials Science and Engineering. SJTU lantingzh@sjtu.edu.cn 1
Scanning electron microscopy Lanting Zhang School of Materials Science and Engineering, SJTU lantingzh@sjtu.edu.cn 1
LM Lamp TEM Electrons Similarity "lllumination" between OM and Glass lens Electromagnetic lens TEM Condenser lens Specimen Glass lens Electromagnetic lens Objective lens First image Glass lens Projector lens Electromagnetic lens Final image Ocular Fluorescent screen Eye 2
Similarity between OM and TEM 2
Confocal scanning microscopy aser 5ca纳ni9 mi个t0r5 detector pin hole microscope Pinhole aperture sample lnle一+
Confocal scanning microscopy 3
General idea of scanning electron microscope (SEM) Source of illumination Light Scanning microscope electron (LM) microscope Condenser lens (SEM) Focusing lens Objective lens Specimen Projection lens Electron detector Eye Stage 4
General idea of scanning electron microscope (SEM) 4
Image generation in SEM:raster scan Acceleration voltage Cathode Wehnelt cylinder Anode This is very much similar to TV Condensor lens 1 FASTX Screen:Brightness is proportional to Condensor lens 2 START SE or BSE signal SLOW 图 Scan generator Deflection coils END (X and Y (scan) deflection) Objective ens Amplifiers ←BSE detector SE detector Secondary Back-scattered electrons(SE electrons Probe (BSE) 5
Image generation in SEM: raster scan 5 This is very much similar to TV