上海文通大学 SHANGHAI JIAO TONG UNIVERSITY Specifications p-Si monocrystalline wafer ·Resistivity:1-10cm Doping:3-5 x 1020 cm-3 Boron Three 1 cm x 1 cm cells Dopants: ·Boron and Phosphorus Contacts: ·Al,Au,Ag,Pd,Cr,Ti
▪ p-Si monocrystalline wafer ▪ Resistivity: 1-10 Ω∙cm ▪ Doping: 3-5 x 1020 cm-3 Boron ▪ Three 1 cm x 1 cm cells ▪ Dopants: ▪ Boron and Phosphorus ▪ Contacts: ▪ Al, Au, Ag, Pd, Cr, Ti Specifications
上海文通大学 SHANGHAI JIAO TONG UNIVERSITY Design (not to scale) Dopant:Phosphorus >1020cm-3 0.19μm 0.01μm n+-Si Gradient 0.3μm n+-Si p-Si (Given) 500μm 0.35μm p+-Si p+-Si Gradient 0.2μm- Al Dopant:Boron >1020-cm3
Dopant: Phosphorus > 1020 cm-3 Design (not to scale) Gradient Gradient Dopant: Boron > 1020 cm-3 p-Si (Given) n+-Si p+-Si 500μm 0.3μm 0.35μm 0.2μm Al 0.19μm 0.01μm n+-Si p+-Si
上海文通大学 SHANGHAI JIAO TONG UNIVERSITY Design(not to scale) Good interface with Si 0.19μm Good conductivity,but 0.01μm Ag poor interface with Si 0.3μm n+-Si Cr p-Si (Given) 500μm 0.35μm p+-Si (Recommended) Al Stable interface with 0.2μm- Al Si,good conductivity
Good interface with Si Design (not to scale) Good conductivity, but poor interface with Si (Recommended) Stable interface with Si, good conductivity p-Si (Given) n+-Si p+-Si 500μm 0.3μm 0.35μm 0.2μm Al 0.19μm 0.01μm Cr Ag Al
上海疚通大鼻 SHANGHAI JIAO TONG UNIVERSITY Fabrication Fabrication
Fabrication Fabrication
国上通大学 SHANGHAI JIAO TONG UNIVERSITY Cleaning Hydrofluoric acid(-10%)dip 1 minute rinse with DI water Piranhat dip(at80°C) 5 minutes tmixture of concentrated H2SO and 30%H2O2,2:1 rinse with DI water Ultrasonication in acetone 3 minutes Ultrasonication in isopropyl alcohol(IPA) 3 minutes rinse with DI water Blow dry with a N2 gun
Hydrofluoric acid (~10%) dip 1 minute rinse with DI water Piranha † dip (at 80°C) † mixture of concentrated H2SO4 and 30% H2O2 , 2:1 5 minutes rinse with DI water Ultrasonication in acetone 3 minutes Ultrasonication in isopropyl alcohol (IPA) 3 minutes rinse with DI water Blow dry with a N2 gun Cleaning