Vibration and Acceleration sAw sensor t Force is converted into displacement force reflectors Spring elastic constant. displacement 3×E×I b×h 1800 1600 1000 E quartz ≈65·10 I+ Cut of frequency for mechanic 8导8888导8 vibration of typical SAW displacement s[um substrate w few khz Figures from Ref.①
Vibration and Acceleration SAW Sensor
M A Torque SAW Sensor Rigidly mounted to a flat spot on a shaft LA Ty Shaft experiences torque , torque will stress the sensor C2 3 TWo SAW torque sensors at right anglesa When one is in compression the other is in tension )temperature drift effects can be minimized Provides lower cost and higher reliability than I competing technologies EG.8 U. S Patent No. 5,585.571
Torque SAW Sensor
SAW Voltage Sensor ZnO-SiO-Si layered structure 485 MHz double oscillators with meta waveguides on 128 LiNbO,o Al pl nttride amsler no Al plate transducer 8 0===- A心U u20 Achieved response Achieved response Ret.①) Re②) Fe 2 Freuweerglagr chagterimdf smsr Bids [V pcar voltag arnd ch eur o thr decode B Bipolar wou applied on botb erode
SAW Voltage Sensor