Advantages of Using SEM over OM Magnification Depth of Field Resolution OM4x-1000X155m-019m 0.2um SEM10x-3000000X4mm-04um 1-10nm The sEM has a large depth of field, which allows a large amount of the sample to be in focus at one time and produces an image that is a good representation of the three-dimensional sample. The SEM also produces images of high resolution, which means that closely features can be examined at a high magnification The combination of higher magnification, larger depth of field, greater resolution and com positional and crystallographic information makes the SEM one of the most heavily used instruments in research areas and industries, especially in semiconductor industry
Advantages of Using SEM over OM Magnification Depth of Field Resolution OM 4x – 1000x 15.5mm – 0.19mm ~ 0.2mm SEM 10x – 3000000x 4mm – 0.4mm 1-10nm The SEM has a large depth of field, which allows a large amount of the sample to be in focus at one time and produces an image that is a good representation of the three-dimensional sample. The SEM also produces images of high resolution, which means that closely features can be examined at a high magnification. The combination of higher magnification, larger depth of field, greater resolution and compositional and crystallographic information makes the SEM one of the most heavily used instruments in research areas and industries, especially in semiconductor industry
Scanning Electron Microscope a Totally Different Imaging Concept e Instead of using the full-field image, a point- to-point measurement strategy is used e High energy electron beam is used to excite the specimen and the signals are collected and analyzed so that an image can be constructed e The signals carry topological, chemical and crystallographic information, respectively of the samples surface https://www.youtube.com/watch?v=vwxyszpttsiatw4:18-4:38 http://www.youtube.com/watch?v=irxmighanbgatn4:16-4:42 https://www.youtube.com/watch?v=npskvg]ktdi
Scanning Electron Microscope – a Totally Different Imaging Concept • Instead of using the full-field image, a pointto-point measurement strategy is used. • High energy electron beam is used to excite the specimen and the signals are collected and analyzed so that an image can be constructed. • The signals carry topological, chemical and crystallographic information, respectively, of the samples surface. http://www.youtube.com/watch?v=lrXMIghANbg at~4:16-4:42 https://www.youtube.com/watch?v=VWxYsZPtTsI at~4:18-4:38 https://www.youtube.com/watch?v=nPskvGJKtDI
Main Applications Topography The surface features of an object and its texture (hardness, reflectivity n. etc) Morphology The shape and size of the particles making up the object(strength defects in IC and chips.etc) Composition The elements and compounds that the object is composed of and the relative amounts of them (melting point, reactivity, hardnessmetc.) Crystallographic Information How the grains are arranged in the object (conductivity, electrical properties, strength.metc.)
Main Applications • Topography The surface features of an object and its texture (hardness, reflectivity… etc.) • Morphology The shape and size of the particles making up the object (strength, defects in IC and chips...etc.) • Composition The elements and compounds that the object is composed of and the relative amounts of them (melting point, reactivity, hardness...etc.) • Crystallographic Information How the grains are arranged in the object (conductivity, electrical properties, strength...etc.)
http://virtual.itguiucedu/training/em_tutorial A Look Inside the column Column Electron gun Gun alignment control Pneumatic air lock valve Condenser lens I+ Objective aperture canning coil Objective lens Motorized stag tage Sarnple Chamber http://www.youtube.com/watch?v=c7evtnvhn-satw1:10-2:10insidethecolumn
A Look Inside the Column Column http://www.youtube.com/watch?v=c7EVTnVHN-s at~1:10-2:10 inside the column http://virtual.itg.uiuc.edu/training/EM_tutorial
Amoredetailedlookinsidehttp://www.youtube.com/watch?v=sfsfpxdaIam Apeture I Microscope column 6V-100V5-50kV How Scanning Electron Microscopes Work Uc U c2009 How stutters <720 Electron Vacuum Anode ammar Figure 1 Gun Chamber tube e- beam Electron Gun Anode Conden Condenser Lens Electron CRT Condenser Beam Scan generator Lens robe-form 1平中 Objective BSE m Chamber Backscatter SE amplifier Detector Detector Specimen Seconda SC,EBIC Sample Detector Data Computer storage https://www.youtuBe.com/watch?v=mr9-1sz_cko Multichannel analyser at~1:06-2:40 Source: L. Reimer, " Scanning Electron https://www.youtubecom/watch?v=gy9if0-tvfe Microscope, 2nd Ed, Springer-Verlag at~2:38-4:45 1998,p.2 a- beam convergence
Source: L. Reimer, “Scanning Electron Microscope”, 2nd Ed., Springer-Verlag, 1998, p.2 e- beam Electron Gun https://www.youtube.com/watch?v=GY9lfO-tVfE at~2:38-4:45 A more detailed look inside - beam convergence <72o https://www.youtube.com/watch?v=Mr9-1Sz_CK0 at~1:06-2:40 http://www.youtube.com/watch?v=sFSFpXdAiAM