3. Production with minimum waste materia/s a)plasma chemistry b)Plasma etching and deposition for microelectronics c)Materials processing with thermal plasma d)surface treatment of materials e)lon implantation of materials 4 Production with minimum toxic waste a)plasma chemistry b)Plasma etching and deposition for microelectronics c)Surface treatment of materials d)lon implantation of materials
3. Production with minimum waste materials a) Plasma chemistry b)Plasma etching and deposition for microelectronics c) Materials processing with thermal plasma d) Surface treatment of materials e) Ion implantation of materials 4. Production with minimum toxic waste a) Plasma chemistry b ) P l a s m a e t c h i n g a n d d e p o s i t i o n f o r microelectronics c) Surface treatment of materials d) Ion implantation of materials
1.2 Important definitions The history of plasma may be recalled to 17th century and the term plasma was introduced by Irving Langmuir in 1928 Now plasma research including three branches Plasma physics: concerned with the basic laws and physic processes which govern the behavior of plasma magnetohydrodynamiCS(MHD) ElectrohydrodynamICS(EHD) Plasma chemistry: concerned with chemical reactions Which occur in the presence of a plasma Plasma science and plasma engineering: concerned with the application of plasma to devices or processes
1.2 Important definitions The history of plasma may be recalled to 17th century and the term plasma was introduced by Irving Langmuir in 1928. Now plasma research including three branches: Plasma physics: concerned with the basic laws and physic processes which govern the behavior of plasma. magnetohydrodynamics(MHD) Electrohydrodynamics(EHD) Plasma chemistry: concerned with chemical reactions which occur in the presence of a plasma Plasma science and plasma engineering: concerned with the application of plasma to devices or processes
1.3 Plasma physics regimes and issues 1 Density and temperature regimes Temperature: 1-20eVleV=11, 605K Density: 1012-1025electron/m3 2 Heterogenous interactions of plasma Plasma can interact with other states of matter individually, or with combination of solids, liquids, and gases Interacting with neutral gases, will result in dissociation,ionization and plasma chemical reaction Interacting directly with solid surface, usually associated with the etching processing or sputtering 3 Approaches to the study of plasmas In the continuum approach, a plasma is treated as if it were a continuous fluid A second major theoretical approach is to regard the plasma as a collection of individual particles, and its collective behavior as the result of their motion a third major approach is to regard the plasma as a black box with inputs and outputs
1.3 Plasma physics regimes and issues 1 Density and temperature regimes Temperature:1-20eV,1eV=11,605K Density:1012-1025electron/m3 2 Heterogenous interactions of plasma Plasma can interact with other states of matter individually,or with combinatios of solids,liquids, and gases. Interacting with neutral gases,will result in dissociation,ionization and plasma chemical reaction, Interacting directly with solid surface, usually associated with the etching processing or sputtering 3 Approaches to the study of plasmas: In the continuum approach, a plasma is treated as if it were a continuous fluid. A second major theoretical approach is to regard the plasma as a collection of individual particles, and its collective behavior as the result of their motion. A third major approach is to regard the plasma as a black box with inputs and outputs
The challenges of plasma physics Multi-body problem Another difficulty is that the differential equations which describe the conservation of particles momentum, and energy in plasmas are often nonlinear Plasma experiments are usually difficult to set up and interpret. Boundary condition; Multivariable problem Difficult to diagnose because of its high kinetic temperature and high energy density two probe methods: perturbing probe such as Langmuir probe and non-perturbing prob such spectrum analysis
The challenges of plasma physics: Multi-body problem; Another difficulty is that the differential equations which describe the conservation of particles, momentum,and energy in plasmas are often nonlinear. Plasma experiments are usually difficult to set up and interpret. Boundary condition;Multivariable problem. Difficult to diagnose because of its high kinetic temperature and high energy density: two probe methods: perturbing probe such as Langmuir probe and non-perturbing prob such spectrum analysis
Homework 1. Please review the social role of the industrial plasma engineering
Homework: 1.Please review the social role of the industrial plasma engineering